Piezoelectric bimorph cantilever is a typical structure for vibration energy harvesting. This paper studies the method to improve the accuracy of FEA (finite element analysis) simulation for piezoelectric bimorph cantilever. The COSMOL simulation methods based on 1 D (dimension) model of Euler Bernoulli beam, as well as 2 D and 3 D models of solid mechanics are proposed respectively. Compared with the theory and experiment results given by Erturk A, the influences of 1 D and 3 D piezoelectric material parameters on simulation accuracy in FEA modeling is discussed. The simulation error can be reduced to less than 1.2% by using 1D piezoelectric material parameters in COMSOL simulation, while the maximum simulation error can be up to 28% by using 3D piezoelectric material parameters. Comparing serial and parallel configurations of piezoelectric bimorph cantilever, the output electrical powers, varying with the excitation frequency and load resistance, are also discussed in COMSOL simulation. Performance comparation of three kinds of piezoelectric bimorph cantilevers with tip mass shows that the modelling and simulation in finite element methods by COMSOL are simple and convenient, and are suitable for the electromechanical coupling analysis and optimization of complex topological structures.

In this paper, a novel resonant pressure sensor is developed based on electrostatic excitation and piezoresistive detection. The measured pressure applied to the diaphragm will cause the resonant frequency shift of the resonator. The working mode stress–frequency theory of a double-ended tuning fork with an enhanced coupling beam is proposed, which is compatible with the simulation and experiment. A unique piezoresistive detection method based on small axially deformed beams with a resonant status is proposed, and other adjacent mode outputs are easily shielded. According to the structure design, high-vacuum wafer-level packaging with different doping in the anodic bonding interface is fabricated to ensure the high quality of the resonator. The pressure sensor chip is fabricated by dry/wet etching, high-temperature silicon bonding, ion implantation, and wafer-level anodic bonding. The results show that the fabricated sensor has a measuring sensitivity of ~19 Hz/kPa and a nonlinearity of 0.02% full scale in the pressure range of 0–200 kPa at a full temperature range of −40 to 80 °C. The sensor also shows a good quality factor >25,000, which demonstrates the good vacuum performance. Thus, the feasibility of the design is a commendable solution for high-accuracy pressure measurements.

Tactile sensors have been widely used in the areas of health monitoring and intelligent human-machine interface. Flexible tactile sensors based on nanofiber mats made by electrospinning can meet the requirements of comfortability and breathability for wearing the body very well. Here, we developed a flexible and self-powered tactile sensor that was sandwich assembled by electrospun organic electrodes and a piezoelectric layer. The metal-free organic electrodes of thermal plastic polyurethane (PU) nanofibers decorated with multi-walled carbon nanotubes were fabricated by electrospinning followed by ultrasonication treatment. The electrospun polyvinylidene fluoride-trifluoroethylene (PVDF-TrFE) mat was utilized as the piezoelectric layer, and it was found that the piezoelectric performance of PVDF-TrFE nanofiber mat added with barium titanate (BaTiO3) nanoparticles was enhanced about 187% than that of the pure PVDF-TrFE nanofiber mat. For practical application, the as-prepared piezoelectric tactile sensor exhibited an approximative linear relationship between the external force and the electrical output. Then the array of fabricated sensors was attached to the fingertips of a glove to grab a cup of water for tactile sensing, and the mass of water can be directly estimated according to the outputs of the sensor array. Attributed to the integrated merits of good flexibility, enhanced piezoelectric performance, light weight, and efficient gas permeability, the developed tactile sensor could be widely used as wearable devices for robot execution end or prosthesis for tactile feedback.

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