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Topography and domain structures of Bi-substituted iron garnet films proposed for magnetoplasmonic applications are presented. Investigations were carried out by scanning probe microscopy methods, including polarization near-field optical microscopy. The most suitable films with less rough surface were chosen. The period of domain structure of sputtered film of composition Bi2.8Y0.2Fe5O12 were determined, 2w = 0.5 μm.

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