Searching
for eligible two-dimensional (2D) semiconductors to fabricate
high-performance (HP) short-channel field-effect transistors (FETs)
at the nanoscale is essential toward the continuous miniaturization
of devices. Herein, we predict the 2D Janus WSi2P2As2 semiconductor and propose it as a qualified channel
material for sub-5 nm FETs by using first-principles calculations.
The results demonstrate that the monolayer Janus WSi2P2As2 is a 2D semiconducting nanofilm with a band
gap of 0.83 eV, a hole mobility of 490 cm2 V–1 s–1 in the armchair direction, and an out-of-plane
polarization. Benefiting from these outstanding intrinsic characteristics,
the performance of the 5 and 3 nm gate-length WSi2P2As2 FETs can fulfill the International Technology
Roadmap for Semiconductors for HP standards after employing optimizing
strategies, including underlap structure, dielectric project, and
cold source. Our results promote the development of new 2D nanomaterials
and device architectures for designing HP short-channel FETs.
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