A new ultra-precision profiler was developed to measure X-ray and EUV optics such as asymmetric and aspheric profiles. In the present study, the normal vectors at each point on the surface are determined by a reflected light beam that follows exactly the same path as the incident beam. The surface gradients at each point are calculated from the normal vector and the surface profile is obtained by integrating the gradient. The measuring instrument was designed according to the above principles. In the design, four goniometers and three-axis movers were applied to adjust the light axis to search for the normal vector at each point on the surface. The angle-positioning resolution and accuracy of each goniometer are respectively 1.8 x 10 -8 radian and 2 x 10 -7 radian. A SiC flat mirror 25.4 mm in diameter and an elliptical profile mirror for nanometer hard X-ray focusing were measured using the present instrument and compared to the measured profile using a Zygo Mark IVxp phase-measuring interferometer.

We present a measurement system for a rotationally symmetric aspheric surface that is designed for accurate and high-volume measurements. The system uses the Shack-Hartmann sensor and is capable of measuring aspheres with a maximum diameter of 90 mm in one shot. In our system, a reference surface, made with the same aspheric parameter as the test surface, is prepared. The test surface is recovered as the deviation from the reference surface using a figure-error reconstruction algorithm with a ray coordinate and angle variant table. In addition, we developed a method to calibrate the rotationally symmetric system error. These techniques produce stable measurements and high accuracy. For high-throughput measurements, a single measurement scheme and auto alignment are implemented; they produce a 4.5 min measurement time, including calibration and alignment. In this paper, we introduce the principle and calibration method of our system. We also demonstrate that our system achieved an accuracy better than 5.8 nm RMS and a repeatability of 0.75 nm RMS by comparing our system's aspheric measurement results with those of a probe measurement machine.

A new ultraprecise profiler has been developed to measure, for example, asymmetric and aspheric profiles. The principle of our measuring method is that the normal vector at each point on the surface is determined by making the incident light beam on the mirror surface and the reflected beam at that point of coincident. The gradient at each point is calculated from the normal vector, and the surface profile is then obtained by integrating the gradients. The measuring instrument was designed in accordance with the above principle. In the design, four ultraprecise goniometers were applied to adjust the light axis for normal vector measurement. The anglepositioning resolution and accuracy of each goniometer are, respectively, 0.018 and 0.2 mrad. Thus, in the measuring instrument, the most important factor is the accuracy of the normal vectors measured by the goniometers. Therefore, the rotating angle-positioning errors were measured and calibrated. An elliptical profile mirror for nanometer hard-X-ray focusing was measured, and compared with the measured profile using a stitching interferometer. The absolute measurement accuracy of approximately 5 nm (peak-to-valley) was achieved. Then the measurements of 1000-mm-long flat, spherical and parabolic mirrors were demonstrated. The surface profiles of the mirrors were obtained by integrating the interpolated gradient. r

A new ultra-precision profiler has been developed in order to measure such as asymmetric and aspheric profiles. In the present study, the normal vectors at each points on the surface are determined by the reflected light beam goes back exactly on the same path as the incident beam. The surface gradients at each point are calculated from the normal vector and the surface profile is obtained by integrating the gradient. The measuring instrument was designed according to the above principle of the measuring method. In the design, four ultra-precision goniometers were applied to the adjustment of the light axis for the normal vector measurement. The angle positioning resolution and accuracy of each goniometer are respectively 0.018 µrad and 0.2 µrad. In the measuring instrument, the most important item is the measuring accuracy of the normal vectors by the goniometers. Therefore, the rotating angle positioning errors were measured and calibrated. Then the measurement of a concave mirror with 300 mm radius and 460mm, 1m long plane mirrors were measured. Then, The 3D surface profile of the mirror such 1m-long flat mirror, a concave mirror with 2000 mm radius and off-axis parabolic mirror are obtained by integrating the interpolated gradient.

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