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Blood compatibility is a key property of biomaterials contacting blood. Titanium oxide film has been deposited on Si wafers (110) by unbalanced reactive magnetron sputtering and successive vacuum annealing. The structure, chemical composition, hydrophilicity and surface energy of the films have been investigated by X-ray diffraction, X-ray photoelectron spectroscopy and contact angle measurement respectively. The results revealed that high vacuum annealing increased the surface energy, hydrophilicity and the rate of of Lewis base in the film. In vitro evaluation of hemocompatibility, including platelet adhesion, fibrinogen denaturation, activated partial thromboplastin time and thrombin time test, proved that the hydrophilic titanium oxide films have excellent blood compatibility.

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