No abstract

We present a silicon-based implantable drug delivery system (IDDS) for the administration of compounds in vivo. The implanted device contains the drug-filled silicon microchip, control circuitry, telemetry capability, and a battery. At the heart of the IDDS is the drug-containing microchip, a MEMS (MicroElectroMechanical Systems)-based device. A process was developed for the fabrication of the silicon chip. MicroCHIPS' drug release technology has been successfully demonstrated in vitro and in vivo using the therapeutic peptide leuprolide as a model compound.

A novel microsystem incorporating a micromachined silicon membrane pump, packaged in a 3D MCM-V package is described. Finite element techniques are used to analyse the encapsulation stress in the assembled structure and the silicon membrane. The design of the silicon chip carrier substrates is improved by modifying the design of the cutting windows to reduce the risk of cracking. A combination of numerical and analytical techniques are used to deduce limits for the maximum permissible dimensions of the membrane to minimise the risk of buckling due to residual compressive stresses.