Hydrogenation operates the bending motion of mover device, which is a platinum coated La Ni alloy film deposited on a polyimide sheet, has been successfully developed. Influence of the operating temperature on the motion strain has been evaluated. When the operating temperature is 373 K, the maximum value of bending strain (De) is 408 ppm, which is 1.4 times larger than that (300 ppm) of an unheated film operated at 323 K.

Hydrogenation operated unimorph device, which is composed of LaNi x hydrogen storage alloy film with Pd over layer, deposited on a carbon fiber reinforced polymer (CFRP) substrate, has been successfully developed. As a result, the bending motion after 100 s, palladium coated LaNi x alloy film with the CFRP supporting sheet exhibits the large bending strain of about 250 ppm, which is 6 times larger than that of the Pt coating LaNi x film on CFRP.

Influences of electron beam (EB) irradiation on magnetostriction and its susceptibility of Fe 2.6 Sm alloy thin films have been investigated. The alloy thin film deposited on a (100) plane of a silicon wafer is prepared by using a direct current magnetron sputtering apparatus. The irradiation enhances compressive magnetostriction and its susceptibility. The large magnetostriction of the irradiated Fe 2.6 Sm sample occurs, because the irradiation prevents generating the Fe 3 Sm crystalline with small magnetostriction. On the other hand, the high susceptibility is explained by randomization, induced by EB irradiation, of Fe 2.6 Sm amorphous sample, where the magnetic moment rotates easily.

A three layered composite mover device constructed with both hydrogen storage La Ni and compressive magnetostrictive Sm Fe alloy thin films on each side surface of polyimide substrate has been prepared by using a flash vacuum evaporation and a direct current magnetron sputtering, respectively. When the motion strain is about -750 ppm at ±400 kA/m of magnetic field before hydrogenation, it is about -1150 ppm after hydrogenation. The hydrogenation of the La Ni alloy film in the three layered composite mover device enhances the magnetostriction.