Resolution of traditional fluorescence microscopy is limited by the diffraction of light. Diffraction limit can be broken by structured illumination to get higher resolution. Compared to other super-resolution microscopy techniques, structured illumination fluorescence microscopy can achieve higher imaging speed and need a simple setup, which has an important application life science research. In this paper, we first illustrate the principle and reconstruction algorithm to obtain 2D and 3D super-resolution images as well as non-linear structured illumination. Then the generally used structured illumination method and setup based on grating, spatial light modulator (SLM) as well as digital micro-mirror device (DMD) are introduced and compared. At last we summarize the application of structured illumination fluorescence microscopy for observing biological structures and processes.
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