2007 IEEE 19th International Conference on Indium Phosphide &Amp; Related Materials 2007
DOI: 10.1109/iciprm.2007.380680
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50 nm MHEMT Technology for G- and H-Band MMICs

Abstract: A metamorphic HEMT (MHEMT) MMIC technology including circuit applications is presented. The MHEMT layers are MBE grown on 4-inch GaAs wafers. The technology is based on a 50 nm gate length MHEMT and includes a 50 pm substrate backside process with dry etched through-substrate vias. For the electron confinement an InO8GaO2As/lnO53Ga047As composite channel was used. The devices are passivated with BCB and SiN to achieve a median time-to-failure of 2.7 x 1 06 h in air.Cut-off frequencies f, and fmax of 375 GHz we… Show more

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Cited by 57 publications
(27 citation statements)
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“…The results presented in this paper are based on mHEMT technologies with 50 nm and 100 nm gate length developed at the IAF [1,2]. The mHEMT layers are grown on 4" semiinsulating GaAs wafers by molecular beam epitaxy (MBE).…”
Section: Technologymentioning
confidence: 99%
“…The results presented in this paper are based on mHEMT technologies with 50 nm and 100 nm gate length developed at the IAF [1,2]. The mHEMT layers are grown on 4" semiinsulating GaAs wafers by molecular beam epitaxy (MBE).…”
Section: Technologymentioning
confidence: 99%
“…In recent years, there has been an increasing demand for MMICs beyond 100 GHz [1,2]. Due to the excellent high frequency and low noise performance, InP-based PHEMT is considered to be a unique candidate for applications beyond 100 GHz.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the excellent high frequency and low noise performance, InP-based PHEMT is considered to be a unique candidate for applications beyond 100 GHz. Many high performance InP-based PHEMTs have been reported [1,2,3,4,5].…”
Section: Introductionmentioning
confidence: 99%
“…They are of great interest for high-resolution imaging, environmental sensor, security detection, broadband satellite communication applications [3]. InP-based PHEMTs have shown more excellent performance of high-gain, wide-band, and low noise than the GaAs-based beyond 100 GHz, thus MMICs based on InP PHEMTs have been reported over the world [1,3,4,5,6,7,8].…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, there has been an increasing demand for MMICs beyond 100 GHz [1,2]. They are of great interest for high-resolution imaging, environmental sensor, security detection, broadband satellite communication applications [3].…”
Section: Introductionmentioning
confidence: 99%