56.3: High Corrosion Resistance Mo Alloy for TFT‐LCD and Touch Screen Panel Metallization

Abstract

A new Molybdenum‐based alloy with high resistance against corrosion and oxidation was developed for TFT display and touch screen panel metallization. Highly environmentally stable alloy films with low resistivity and low film stress were made by DC magnetron sputtering. The oxide passivation layer was characterized by photoelectron spectroscopy (XPS).

48.4: Galvanic Corrosion of Molybdenum Alloys and Oxides in contact with Copper for Thin Film Transistors using Evans Diagrams

“…significant undercut of Mo oxide below the Cu layer after the stripping and rinsing process when used as bottom layer. Behavior of Mo material in different etching solutions has been investigated by other authors using polarization curves [2][3][4][5][6].…”

P‐145: Optimization of Molybdenum Oxides for Low‐Reflectance Thin Films using Numerical Simulation

“…In order to optimize the visual performance of the touch sensor, a low-reflectance bridge metallization consisting of MoOx/Al/Mo was proposed by Toppan Printing Co, Ltd [1]. For the wiring structure of touch sensor applications, Mo alloys like MoTa are typically preferred, due to their higher corrosion and oxidation resistance [2]. Within this work we investigated the optical properties of MoOx thin films, using numerical simulation to predict the optical performance of different layer structures.…”