Proceedings of Ninth International Workshop on Micro Electromechanical Systems
DOI: 10.1109/memsys.1996.493824
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A 1.5 V supplied, CMOS ASIC for the actuation of an electrostatic micromotor

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Cited by 8 publications
(7 citation statements)
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“…Since magnetic devices are difficult to integrate in small spaces, this drive would be comparably difficult to integrate fully on chip. In [7], an application specific integrated circuit is proposed for micromotors. This is an attempt to provide an integrated drive.…”
Section: Drive Requirementsmentioning
confidence: 99%
“…Since magnetic devices are difficult to integrate in small spaces, this drive would be comparably difficult to integrate fully on chip. In [7], an application specific integrated circuit is proposed for micromotors. This is an attempt to provide an integrated drive.…”
Section: Drive Requirementsmentioning
confidence: 99%
“…In fact, if this electrostatic spring stiffness exceeds the mechanical spring stiffness , the dynamic system described by (15) will be unstable. The bias voltage at which this occurs is found by setting the two spring terms equal to each other and solving for (16) The Laplace transform of (15) is that of a classical secondorder system (17) where , , and are the dc gain, natural frequency, and quality factor, respectively. The relationship between these quantities and the coefficients of (15) is given by…”
Section: B Actuator Frequency Responsementioning
confidence: 99%
“…It is tempting to suggest that the resonant frequency be as low as possible, demanding a very compliant flexural suspension. However, because the model in (17) neglects higher order and out-ofplane resonances, this conclusion is erroneous. In order to ensure that these higher order modes can be safely neglected, it is important that the suspension be as stiff as possible in the out-of-plane directions, meaning that the primary resonance frequency should approach the control bandwidth.…”
Section: Selecting the Desired Resonant Frequencymentioning
confidence: 99%
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