“…In fact, if this electrostatic spring stiffness exceeds the mechanical spring stiffness , the dynamic system described by (15) will be unstable. The bias voltage at which this occurs is found by setting the two spring terms equal to each other and solving for (16) The Laplace transform of (15) is that of a classical secondorder system (17) where , , and are the dc gain, natural frequency, and quality factor, respectively. The relationship between these quantities and the coefficients of (15) is given by…”