The effect of oxide breakdown (BD) on the performance of CMOS inverters has been investigated. The results show that the inverter performance can be affected by the BD in a different way depending on the stress polarity applied to the inverter input. In all the cases, the oxide BD conduction has been modeled as gate-to-diffusion leakage with a power-law formula of the type = , which was previously found to describe the BD in capacitor structures. This implies that the BD physics at oxide level is the same as that at circuit level.Index Terms-CMOS, dielectric breakdown, hard breakdown (HBD), leakage currents, oxide breakdown, oxide reliability.