A chronic micropositioning system for neurophysiology

Muthuswamy, Jit; Salas, Daniela; Okandan, Murat

doi:10.1109/iembs.2002.1053195

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Introduction4

Long-range Position Sensing and Control In Mems Applications1

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Cited by 11 publications

(9 citation statements)

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“…Micro/nanopositioning systems are widely used in various applications, such as optical alignment [1,2], scanning probe microscope [3,4] and micro/ nanomanufacturing [5][6][7][8][9]. The majority of practical nanopositioners utilize flexure-based structures, such as compliant mechanisms and notch-flexure-based mechanisms, due to their smooth and friction-free motion and high durability without wear and deterioration.…”

Section: Introductionmentioning

confidence: 99%

Design of high-bandwidth high-precision flexure-based nanopositioning modules

Polit

Dong

2009

Journal of Manufacturing Systems

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Section: Introductionmentioning

confidence: 99%

Design of high-bandwidth high-precision flexure-based nanopositioning modules

Polit

Dong

2009

Journal of Manufacturing Systems

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“…The stage is capable of providing smooth motions through deformations of special material such as piezostacks or shape memory alloy. Many successful applications of micropositioning stages have also been reported [4]- [6].…”

Section: Introductionmentioning

confidence: 95%

Development and Evaluation of Linear Characteristic of a Complex Flexure Hinge

Zhang

2009

2009 Second International Conference on Information and Computing Science

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This paper concentrates on the development and evaluation of linear characteristics of a complex flexure hinge with high accuracy and large stiffness. The flexure hinge mechanism is used to clamp the shaft of a micropositioning stage based on the inchworm principle. Six key parameters of the flexure hinge are optimized by using finite element method. Developed flexure hinge has very good effects on the clamping and resilience that are accurate and reasonable. The evaluation result shows that the flexure hinge has excellent linear characteristic.

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“…They find application in micro and nanopatterning (imprint lithography, for example), scanning probe microscopy, and various other scanned probe/tool-based metrology and process equipment [1][2][3][4][5][6][7]. While there are many definitions for nanopositioning stages, here we refer to a system that can automatically position a worktable (end effector) with certain degrees-of-freedom (DOF) in its workzone and maintain a resolution of the order of a few nanometers.…”

Section: Introductionmentioning

confidence: 99%