A compact ΔE-Eres detector for elastic recoil detection with high sensitivity

Bergmaier, A.; Dollinger, G.; Frey, C.M.

doi:10.1016/s0168-583x(97)00877-x

Cited by 46 publications

(14 citation statements)

References 7 publications

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“…In ERD experiments the relative energy resolution is in most cases not better than 1% of the total energy [20]. Consequently, the depth resolution is limited to about 10 nm in any solid material even if low incident angles are used in order to spread the depth profiles.…”

Section: High Resolution Erdmentioning

confidence: 99%

Doping Density Depth Profiling Analysis with High Resolution Elastic Recoil Detection

Bergmaier¹,

Dollinger²

2007

ECS Trans.

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The quantitative analysis of light elements in ultra thin films thinner than 10 nm is still a nontrivial task. This paper summarizes the prospects of high-resolution Elastic Recoil Detection (ERD) using a Q3D magnetic spectrograph. It is shown that sub-nanometer resolution can be achieved in ultra thin films and even monolayer resolution is possible close to the surface. ERD has the best quantification possibilities compared to any other method. Sensitivity is sufficient to analyze main elements and impurities as e.g. necessary for the characterization of microelectronic materials. In addition, high-resolution channeling ERD can be performed in order to obtain information on lattice location of light elements in crystalline ultra thin layers. The potential of high-resolution ERD is demonstrated by several applications where it is the most valuable tool for elemental profiling.

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Section: High Resolution Erdmentioning

confidence: 99%

Doping Density Depth Profiling Analysis with High Resolution Elastic Recoil Detection

Bergmaier¹,

Dollinger²

2007

ECS Trans.

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“…Quanti®cation was done using a low resolution DE À E measurement [11] at a scattering angle of 38°, which was simultaneously performed beside the magnetic analysis. Total integrated values for oxygen 1X0 AE 0X1 Â 10 16 atacm 2 , nitrogen 8X8 AE 1X0 Â 10 14 atacm 2 and some other elements which contaminated the surface like hydrogen 2X5 AE 0X8 Â 10 15 atacm 2 and carbon 2X5 AE 0X8 Â 10 15 atacm 2 were determined and used to calibrate the high resolution pro®les.…”

Section: High Resolution-erd (H-erd) Analysismentioning

confidence: 99%

Characterization of ultra thin oxynitrides: A general approach

Brijs

Deleu

Conard

et al. 2000

Nuclear Instruments and Methods in Physics Research Section B:

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The determination of nitrogen depth pro®les in thin oxynitride layers (1.5±3 nm) becomes more and more important in microelectronics. The goal of this paper is to investigate a methodology for the characterization of thin oxynitride layers with the aim to establish in a quantitative manner the layer thickness, N-content and detailed N-depth pro®le. For this study ultra thin oxynitride ®lms of 2.5 nm on Si were grown by oxygen O 2 annealing of Si followed by a NO annealing. The global ®lm characteristics were measured using spectroscopic ellipsometry (SE) (thickness), atomic force microscopy (AFM) for roughness and X-ray photoelectron spectroscopy (XPS) for total O-and N-content. Depth pro®les of oxygen, silicon and nitrogen were obtained using (low energy) secondary ion mass spectroscopy (SIMS) and time of¯ight (TOF)-SIMS, high resolution-Rutherford backscattering (H-RBS) (magnetic sector and TOF) and high resolution-elastic recoil detection (H-ERD). A comparison of the results obtained with the dierent techniques is presented and discussed. Ó

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“…The anode signal should be insensitive to position, giving a signal proportional to total electron charge while the cathode signal is proportional to both the total ionization and position. Position sensitivity can be achieved by comparing cathode and anode pulse heights, or by measuring the drift time of electrons to the Frisch grid 9,10 . Additionally splitting one of the electrodes into sawtooth segments can be used to achieve position sensitivity in the perpendicular direction.…”

Section: Introductionmentioning

confidence: 99%

“…Additionally splitting one of the electrodes into sawtooth segments can be used to achieve position sensitivity in the perpendicular direction. 10,11 .…”

Section: Introductionmentioning

confidence: 99%

Simulations on time-of-flight ERDA spectrometer performance

Julin

Arstila

Sajavaara

2016

Review of Scientific Instruments

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The performance of a time-of-flight spectrometer consisting of two timing detectors and an ionization chamber energy detector has been studied using Monte Carlo simulations for the recoil creation and ion transport in the sample and detectors. The ionization chamber pulses have been calculated using Shockley-Ramo theorem and the pulse processing of a digitizing data acquisition setup has been modeled. Complete time-of-flight-energy histograms were simulated under realistic experimental conditions. The simulations were used to study instrumentation related effects in coincidence timing and position sensitivity, such as background in time-of-flight-energy histograms. Corresponding measurements were made and simulated results are compared with data collected using the digitizing setup.

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A compact ΔE-Eres detector for elastic recoil detection with high sensitivity

Cited by 46 publications

References 7 publications

Doping Density Depth Profiling Analysis with High Resolution Elastic Recoil Detection

Doping Density Depth Profiling Analysis with High Resolution Elastic Recoil Detection

Characterization of ultra thin oxynitrides: A general approach

Simulations on time-of-flight ERDA spectrometer performance

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