A comparison between RF MEMS switches and semiconductor switches

Grant, P.D.; Denhoff, M.W.; Mansour, R.R.

doi:10.1109/icmens.2004.1332357

Cited by 26 publications

(28 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…On the other hand, they generate the following drawbacks; they may need expensive packaging to protect the movable MEMS bridges against the environment, high losses at microwave also in mm-wave frequencies and limited power-handling capability [21][22]. …”

Section: Reconfiguration By Mems Technologiesmentioning

confidence: 99%

Miniature design of T-Shaped frequency Reconfigurable antenna for S-Band Application using Switching Technique

Maleky¹,

Abdelouahab²,

Essaaidi³

et al. 2017

IJECE

View full text Add to dashboard Cite

The article presents a miniature antenna with a simple geometry and a simple approach for reconfiguration. In order to make the T-shaped antenna frequency reconfigurable, we integrated Switches in specific positions. The location of the switches is determined following a study of the distribution of the surface currents of the suggested antenna. Indeed, we found that the insertion of switches in places where the concentrations of surface currents are high is irrelevant. In fact, to redirect current flow, the PIN diodes or RF Switch must be placed in positions where the distribution of the surface currents is of low concentration. These locations facilitate the establishment of new trajectories of the flux of current. As a result, a miniature tunable antenna dimension 20mm*20mm*1.6mm printed on FR4 substrate with 4.4 permittivity and with 0.04 loss tangent, the antenna can be adopted in many communication devices in view of its small size, its low manufacturing cost and performance on frequency sweep, the antenna operates in S-Band with an acceptable band and gain. The antenna is simulated and optimized using CST Microwave Studio.

show abstract

Section: Reconfiguration By Mems Technologiesmentioning

confidence: 99%

Miniature design of T-Shaped frequency Reconfigurable antenna for S-Band Application using Switching Technique

Maleky¹,

Abdelouahab²,

Essaaidi³

et al. 2017

IJECE

View full text Add to dashboard Cite

show abstract

“…On the other hand, electrostatic actuators have the advantage of low power consumption [4], but when compared to ETC microactuators of similar dimensions the output force is almost 3 orders of magnitude lower, even with 10 times the drive voltage [2]. For devices that demand structures with relatively stiffer mechanical parts, this creates a problem because it becomes increasingly difficult to obtain the same displacement using voltages that lie within the CMOS operating regime.…”

Section: Motivationmentioning

confidence: 99%

Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

Alwan

Aluru

2009

J. Microelectromech. Syst.

View full text Add to dashboard Cite

The goal of this research is to integrate electrothermal and electrostatic actuation in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical microactuators have more advantages than pure electrothermal or electrostatic devices. We further propose a framework to model hybrid electrothermomechanical actuation to get a consistent solution for the coupled mechanical, thermal and electrical fields in the steady-state.Employing a Lagrangian approach, the inhomogeneous current conduction equation is used to describe the electric potential, while the thermal and displacement fields are obtained by solving the nonlinear heat conduction equation and by performing a large deformation mechanical analysis, respectively. To preserve numerical accuracy and reduce computational time, we also incorporate a boundary integral formulation to describe the electric potential in the medium surrounding the actuator. We show through the example of a hybrid double-beam actuator, that electrothermomechanical actuation results in low voltage, low power operation that could be used for switching applications in MEMS. We also extend the same device towards bidirectional actuation and demonstrate how it may be used to overcome common problems like stiction that occur in MEMS switches.ii

show abstract

“…Micromechanical switches operating at radio frequencies (RF) have exhibited superior performance over transistor-based counterparts in insertion loss, isolation, and power handling capability [1]. In particular, the small input capacitance of MEMS switches offers switch figure of merits (FOM's) several orders better than transistor counterparts, which could substantially enhance the efficiency of periodic switch applications, such as power amplifiers and converters.…”

Section: Introductionmentioning

confidence: 99%

Micromechanical Resonant Displacement Gain Stages

Kim

Yang

Huang³

et al. 2009

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems

View full text Add to dashboard Cite

Micromechanical resonant displacement gain stages have been demonstrated that employ directionally engineered stiffnesses in resonant structures to effect displacement amplification from a driven input axis to an output axis. Specifically, the introduction of slots along the output axis of a 53-MHz wine-glass mode disk resonator structure realizes a single gain stage with a measured input-to-output displacement amplification of 3.08x. Multiple such mechanical displacement gain stages can then be cascaded in series via half-wavelength beam couplers to achieve multiplicative gain factors; e.g., two cascaded gain stages achieve a total measured gain of 7.94x. The devices have also been operated as resonant switches, where displacement gain allows impact switching via actuation voltages of only 400mV, which is 6x smaller than for previous resoswitches without displacement gain. The availability of such high frequency displacement gain strategies for resonant switches may soon allow purely mechanical periodic switching applications (such as power amplifiers and power converters) with much higher efficiencies than current transistor-based versions.

show abstract

A comparison between RF MEMS switches and semiconductor switches

Cited by 26 publications

References 6 publications

Miniature design of T-Shaped frequency Reconfigurable antenna for S-Band Application using Switching Technique

Miniature design of T-Shaped frequency Reconfigurable antenna for S-Band Application using Switching Technique

Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation

Micromechanical Resonant Displacement Gain Stages

Contact Info

Product

Resources

About