A groove engineered ultralow frequency piezomems energy harvester with ultrahigh output voltage

Abstract

In this paper, for the first time, a new design for a MEMS cantilever-based energy harvester (EH) has been proposed which takes advantage of two engineered piezoelectric layers. The output voltage of the EH has been increased by the aid of making grooves in the piezoelectric layers. By application of the grooves in the piezoelectric layers, the sensitivity of the cantilever as the vibration sensor or the EH has been improved. Results have shown that these grooves can increase the output voltage and decrease the resonance frequency which are desired changes in designing EHs. The single and double groove bimorph cantilevers have been compared and discussed. The position, length and depth of the grooves have been used as optimization parameters and consequently an optimal design has been proposed at the end of the paper. In the optimal design the top and the bottom piezoelectric layers have not covered the entire beam and have different lengths to produce maximum voltage. By means of groove engineering, we could rise the voltage from 5.395 V to 28.35 V which is considered a great improvement compared to other structures reported previously.

Design and simulation of a flat cap mushroom shape microelectromechanical systems piezoelectric transducer with the application as hydrophone

“…It should be noted that the numerical simulation process used in this paper has been validated in our previous works on MEMS sensors and energy harvesters [32][33][34][35]. We have previously shown that our results for MEMS hydrophones are in a very close agreement with an experimentally fabricated hydrophone [36].…”

Particle swarm approach to the optimisation of trenched cantilever‐based MEMS piezoelectric energy harvesters

“…In fact, by trenching the PZT, the stress distribution along the cantilever changes, the trenched region undergoes the largest stress and the average stress of the beam increases compared to the case without a trench. Every trench with its own position and dimensions provides its own energy harvester characteristics [36]. The optimisation algorithm seeks the best position, depth and length for the trench.…”

MEMS piezoresistive pressure sensor with patterned thinning of diaphragm

“…Widespread applications of Microelectromechanical systems (MEMS) as sensors (Amiri and Kordrostami, 2018;Hwang et al, 2019;Kumar et al, 2018;Rafiee et al, 2016), switches (Samaali et al, 2015;Kim et al, 2018) and energy harvesters (Kordrostami and Roohizadegan, 2019;Kordrostami and Roohizadegan, 2018;Ghoddus et al, 2019;Ghoddus and Kordrostami, 2018) have revolutionized the technology in terms of the size of the devices (particularly the sensors) and high integration capability with electric circuits (Rafiee et al, 2017;Amiri et al, 2020). Micromachined pressure sensor is the most commonly used MEMS sensors.…”