1992
DOI: 10.1063/1.351124
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A multipoint correlation method with binomial weighting coefficients for deep-level measurements in metal-oxide-semiconductor devices

Abstract: A multipoint correlation method is proposed for an improvement in the selectivity of bulk trap and interface-state measurements in metal-oxide-semiconductor devices from capacitance, voltage, and current transients. It relies on using a multipoint weighting function with binomial weighting coefficients instead of a two-point weighting function originally proposed by Lang [J. Appl. Phys. 45, 3023 (1979)].

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Cited by 15 publications
(5 citation statements)
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“…Crowell and Alipanahi [3], Thurzo et al [6] and Hodgart [7] developed techniques to construct step-like weighting functions of a given order. The mathematical basis and properties of filters with binary coefficients were discussed in detail by Dmowski [8]. Atanasov [9,10] developed filters of the sixth and higher orders, which were the sum of sine waves with different amplitudes and periods.…”
Section: Classification Of the Weighting Functions Based On The Asymp...mentioning
confidence: 99%
See 1 more Smart Citation
“…Crowell and Alipanahi [3], Thurzo et al [6] and Hodgart [7] developed techniques to construct step-like weighting functions of a given order. The mathematical basis and properties of filters with binary coefficients were discussed in detail by Dmowski [8]. Atanasov [9,10] developed filters of the sixth and higher orders, which were the sum of sine waves with different amplitudes and periods.…”
Section: Classification Of the Weighting Functions Based On The Asymp...mentioning
confidence: 99%
“…The idea of increasing the resolution of the spectrum by delaying the weighting function was briefly mentioned in the early works of Miller et al [2], Crowell and Alipanahi [3] and Tokuda et al [11,12]. Later Dmowski [8] obtained analytical expressions for the determination of rate windows of a lock-in with different delay times. To obtain a straight line on the Arrhenius plot after the introduction of a delay time, it was proposed [11][12][13][14][15] to keep the t d /t c ratio fixed.…”
Section: Analysis Of the High-temperature Side Of The Dlts Peak And T...mentioning
confidence: 99%
“…In addition, this approach cannot explain the observed degradation of the Arrhenius dependences shown in Fig. 1 (see also [4][5][6] Therefore, the present article is aimed first, at the construction of a model for the DL charge transfer kinetics explaining the nonexponential shape of capacitance relaxation signals and accompanying facts and second, at the development of a method for an analysis of such dependences to obtain more adequate results of interpretation of the DL spectrum.…”
Section: Introductionmentioning
confidence: 99%
“…Such situation introduces significant methodological errors in the determination of the deep level parameters. In [1, [4][5][6], nonexponential capacitance relaxation was explained by simultaneous charge transfer by several deep levels having close rates of thermal emission. In our opinion, DLTS peaks from these DL can merge into one peak due to insufficient spectral sensitivity of the method.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17] DLTS uses capacitance, voltage, or current transient signals resulting from relaxation processes following an abrupt change of the bias voltage or light applied to the investigated structure. These measurement modes are called constant voltage ͑CV͒ DLTS, constant capacitance ͑CC͒ DLTS, and current DLTS, respectively.…”
Section: Introductionmentioning
confidence: 99%