2010
DOI: 10.1143/jjap.49.096602
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A New Micro-rate Sensor Based on Shear Horizontal Surface Acoustic Wave Gyroscopic Effect

Abstract: In this paper, we present a new micro-rate sensor based on the shear horizontal surface acoustic wave (SH-SAW) gyroscopic effect. The new SH-SAW propagating along the ST-90°X quartz substrate with heavy metallization exhibits excellent temperature stability, large acoustic velocity, high electromechanical coupling factors, and very small propagation attenuation. The response mechanism of such an SH-SAW micro-rate sensor was established using partial-wave analysis methods. The angular detection sensitivity in t… Show more

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Cited by 22 publications
(12 citation statements)
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“…In [15], Wang et al proposed another variant of a SAW based SSG on two delay lines. Their theoretical research has shown that a SAW based gyro working in the shear horizontal surface acoustic wave (SH SAW) mode is likely to have sensitivity about 10 times higher than that of the gyro operating in the Rayleigh SAW mode (Fig.…”
Section: Ssg On Shear Horizontal Sawsmentioning
confidence: 99%
See 1 more Smart Citation
“…In [15], Wang et al proposed another variant of a SAW based SSG on two delay lines. Their theoretical research has shown that a SAW based gyro working in the shear horizontal surface acoustic wave (SH SAW) mode is likely to have sensitivity about 10 times higher than that of the gyro operating in the Rayleigh SAW mode (Fig.…”
Section: Ssg On Shear Horizontal Sawsmentioning
confidence: 99%
“…1 The article is published in the original. Wang and Lee with different research groups made attempts to use them directly or in conjunction with a SAW resonator [11][12][13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…Issues considered in recent literature include the choice of the sensitive element material [6,8,9], and the possibility of passive implementation with a wireless interface [10][11][12]. Acceleration measurements represent a prominent application possibility [13], where the proposed class of solutions has the potential to develop serial devices characterized by enhanced robustness and the implementation of high-G values, as indicated by a series of recent publications [14][15][16][17], including some developments by our research team [18,19].…”
Section: Introductionmentioning
confidence: 99%
“…This type of SAW gyroscope has unique properties such as superior inherent shock and vibration robustness, easy resonance frequency matching between the drive and sense modes, low power consumption, and facile wireless circuit implementation [5][6][7][8]. To date, few research groups have reported on SAW-based gyroscopes that have different designs and structures [9][10][11][12][13][14]. Varadan et al reported a 74.2-MHz MEMS-IDT SAW gyroscope [12], and Kurosawa et al demonstrated the effect of the metal dot array design on the gyroscope's performance [13].…”
Section: Introductionmentioning
confidence: 99%