A piezoelectric-driven rotary actuator by means of inchworm motion

A large-range compliant micropositioning stage with remote-center-of-motion characteristic for parallel alignment

“…Besides, in order to preload the PSA, two shim blocks are employed where a high precision adjustment is assured to provides the PSA with essential contact on the input terminal of the stage. The preloading theory for the two shim blocks is described in Li et al (2013). The experimental setup is shown in Fig.…”

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

“…In the stacked form platforms, one layer only achieves one degree of freedom. Several 2 of 14 motion principles have been applied to obtain this only one motion degree of freedom, for instance stick-slip principle [11][12][13], inchworm principle [14][15][16][17] and ultrasonic principle [18][19][20]. Afterwards, several layers should be stacked together to obtain the multi-DOF motion, which causes the challenge of reliability because of abrasion and complicated structures.…”

Piezoelectric inertial rotary actuators based on asymmetrically clamping structures

“…Many novel piezoelectric actuators have been developed, including ultrasonic [16,17], direct drive [18,19], inchworm [20,21], and inertial types [22,23]. The inertial actuator is a new type of micro-actuator that is commonly driven by only one active component.…”