A SOI Pirani sensor with triple heat sinks

Li, Q.; Goosen, J.F.L.; Beek, J.T.M. van; Keulen, Fred van

doi:10.1016/j.sna.2010.05.031

Cited by 18 publications

(9 citation statements)

References 8 publications

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“…A micro-Pirani vacuum sensor with five-decade operating vacuum pressure range has been developed with the help of mutual heat transfer, and its detection limit has been expanded to 3 × 10 −1 Pa [10]. The micro-Pirani vacuum sensor with triple heat sinks has contributed to a larger dynamic vacuum pressure range, from 0.02 to 500 Torr (from 2.66 to 6.65 × 10 4 Pa) [11]. Laser-induced heating is applied to expand the dynamic vacuum pressure range thus that the lower limit of vacuum pressure measurement is as low as 10 −6 Torr (1.33 × 10 −4 Pa) [12].…”

Section: Introductionmentioning

confidence: 99%

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Wei

Liu

et al. 2019

Sensors

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Micro-Pirani vacuum sensors usually operate at hundreds of microwatts, which limits their application in battery-powered sensor systems. This paper reports a diode-based, low power consumption micro-Pirani vacuum sensor that has high sensitivity. Optimizations to the micro-Pirani vacuum sensor were made regarding two aspects. On the one hand, a greater temperature coefficient was obtained without increasing power consumption by taking advantage of series diodes; on the other hand, the sensor structure and geometries were redesigned to enlarge temperature variation. After that, the sensor was fabricated and tested. Test results indicated that the dynamic vacuum pressure range of the sensor was from 10−1 to 104 Pa when the forward bias current was as low as 10 μA with a power consumption of 50 μW. Average sensitivity was up to 90 μV/Pa and the sensitivity of unit power consumption increased to 1.8 V/W/Pa. In addition, the sensor could also work at a greater forward bias current for better sensor performance.

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Section: Introductionmentioning

confidence: 99%

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Wei

Liu

et al. 2019

Sensors

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“…Li et al . reported a SOI Pirani sensor that can test the pressure ranging from 10 pa to 26.6 kPa, but it has high power consumption and is difficult to fabricate [ 4 ]. In early 1990s, Bao et al .…”

Section: Introductionmentioning

confidence: 99%

Design and Application of a High Sensitivity Piezoresistive Pressure Sensor for Low Pressure Conditions

Huang

2015

Sensors

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In this paper, a pressure sensor for low pressure detection (0.5 kPa–40 kPa) is proposed. In one structure (No. 1), the silicon membrane is partly etched to form a crossed beam on its top for stress concentration. An aluminum layer is also deposited as part of the beam. Four piezoresistors are fabricated. Two are located at the two ends of the beam. The other two are located at the membrane periphery. Four piezoresistors connect into a Wheatstone bridge. To demonstrate the stress concentrate effect of this structure, two other structures were designed and fabricated. One is a flat membrane structure (No. 2), the other is a structure with the aluminum beam, but without etched silicon (No. 3). The measurement results of these three structures show that the No.1 structure has the highest sensitivity, which is about 3.8 times that of the No. 2 structure and 2.7 times that of the No. 3 structure. They also show that the residual stress in the beam has some backside effect on the sensor performance.

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“…The new sensor elements are much smaller in size and are competitive 2,4,5, [11][12][13]21,[28][29][30][31][32][33][36][37][38]42,45 with or even improved 1,3, 15,17,[23][24][25]43 in sensitivity compared to conventional Pirani gauges. Many designs [6][7][8][9][10][14][15][16][17][18][19][20]22,26,34 have been developed for specific pressure ranges. For the rough vacuum regime, there are mainly two different approaches for improving the sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes

Grau

Völklein

Meier

et al. 2014

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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A SOI Pirani sensor with triple heat sinks

Cited by 18 publications

References 8 publications

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Highly Sensitive Diode-Based Micro-Pirani Vacuum Sensor with Low Power Consumption

Design and Application of a High Sensitivity Piezoresistive Pressure Sensor for Low Pressure Conditions

Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes

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