A Study on Metal-Doped Diamond-Like Carbon Film Synthesized by Ion Source and Sputtering Technique

Dai, Mingjiang; Zhou, Kesong; Lin, Shisheng; Huijun, Hou; Zhu, Xiaobo; Li, Hongwu; Niu, Shi-Chao

doi:10.1002/ppap.200730704

Cited by 8 publications

(4 citation statements)

References 7 publications

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“…There are several studies reported in the literature that concern the methods to reduce the residual compressive stress in a-C:H films, either through incorporation of foreign elements in the a-C:H matrix [23,24] or by using a multilayer structure [25]. Delamination of the film from the substrate, due to high residual compressive stress, is one of the major issues with a-C:H films.…”

Section: Residual Stressmentioning

confidence: 99%

Studies of nanostructured copper/hydrogenated amorphous carbon multilayer films

Dwivedi¹,

Kumar²,

Ishpal³

et al. 2011

Journal of Alloys and Compounds

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Section: Residual Stressmentioning

confidence: 99%

Studies of nanostructured copper/hydrogenated amorphous carbon multilayer films

Dwivedi¹,

Kumar²,

Ishpal³

et al. 2011

Journal of Alloys and Compounds

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“…The metal (Mo and W) doped hydrogenated DLC can exhibit high thermal stability up to an annealing temperature of 500 °C without oxidation occurring in the film (Fu et al, 2005). Comparing to pure DLC, the metal doped DLC can have higher hardness and elastic modulus, lower friction coefficient and better wear resistance because of the formation of metallic carbides in the films, and film adhesion to substrate can be improved due to interface mixing (Liu et al, 2007;Dai et al, 2007). The metal doped DLC thin films have been successfully used on various tools, molds, and dies to prolong their life time.…”

Section: Metal Doped Dlcmentioning

confidence: 99%

Synthesis and characterization of boron incorporated diamond-like carbon thin films

et al. 2015

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Diamond-like carbon (DLC) thin films have been attracting significant interest from both academic and industrial communities due to their unique structures and properties. Boron (B) incorporation is very promising to modify DLC properties for electronic and mechanical applications. However, the current techniques suffer from their limitations and it's difficult to use them to prepare high quality B incorporated DLC (B-DLC) films to meet application demands. A recently developed biased target ion beam deposition (BTIBD) technique has been applied to produce high quality DLC based films, but no work has been reported on synthesis of B-DLC films by BTIBD and their characteristics.In this work, B-DLC films were synthesized on silicon wafers using BTIBD technique, where DLC was deposited by ion beam deposition and B was simultaneously incorporated by ion beam sputtering of boron carbide (B 4 C) under different conditions. DLC films and B-carbon (B-C) films were also synthesized by ion beam deposition and ion beam sputtering of B 4 C under similar conditions, respectively, as reference samples and for estimation of B 4 C sputtering rate and DLC deposition rate to control the B content in B-DLC. Scanning electron microscopy, atomic force microscopy, X-ray diffraction, Raman spectroscopy, synchrotron-based X-ray photoelectron spectroscopy and near edge X-ray absorption fine structure were applied to investigate morphology, microstructure, chemical composition and bonding state of the films.Nanoindentation and ball-on-disc tests were conducted using a Universal Mechanical Tester to measure hardness, Young's modulus and friction coefficient of the synthesized films. The preliminary relationships between processing conditions, film structures and properties were

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“…No degradation and oxidation has been found in Mo and W doped DLC films after annealing in 500 °C [44]. Therefore, in comparison with pure DLC, metal doped DLC offers higher hardness and elastic modulus, less coefficient of friction, better wear resistance and well adhesion due to lower internal stress during film deposition [43,49]. …”

Section: Metal Doped Dlcmentioning

confidence: 98%

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

Ashtijoo

Bhattacherjee

Sutarto

et al. 2016

Surface and Coatings Technology

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The application of Polyethylene terephthalate (PET) has been steadily increasing during recent years. However, its low wear resistance, high gas permeation rate and poor biocompatibility have significantly limited its applications in some specific areas. On the contrary, diamond-like carbon (DLC) possesses many unique properties such as the high hardness, low friction coefficient, high transparency, good gas barrier, excellent biocompatibility, and low synthesis temperature, which makes it an ideal coating material for modifying the surfaces of PET for applications as food and beverage containers and biomedical implants. Nevertheless, the adhesion of DLC on PET is poor due to the high stress induced by ion bombardment during DLC deposition and the large mechanical property mismatch between the coating and the substrate. Therefore, it is very important to develop techniques to lower the stress of DLC and to enhance the adhesion strength of DLC to PET.In the present thesis work, low energy end-hall (EH) ion source and element (N and Si) doping were used to deposit DLC to lower its internal stress and ion beam treatment was performed to modify the surface of PET to enhance the adhesion between DLC and PET. In addition, two different hydrocarbon gases (CH 4 and C 2 H 2 ) were used as precursors for DLC deposition in order to understand the effect of precursor gas. The structure and properties of the treated PET and deposited DLC films were characterized by various advanced techniques: The adhesion of DLC to PET was assessed using scratch testing; the composition and bonding states of DLC and treated PET were analyzed by Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), and near edge X-ray absorption fine structure (NEXAFS); the hardness and Young's modulus were measured by nano-indentation; the tribological properties of the coated materials were evaluated by pin-on-disk sliding testing; and the surface tomography and surface roughness were investigated by atomic force microscopy and N forms sp 3 C-N and sp 2 C=N bonds in the films. Consequently, the hardness values decrease from 11.5 GPa for pure DLC to 7.0 GPa for N-DLC samples whereas the hardness of Si-DLC increases with increasing the silicon content. In addition, N doping can reduce residual stress of DLC and thus increases adhesion of DLC. The DLC films deposited using methane show better properties than using acetylene. By optimizing the conditions, dense, smooth, and adhesive DLC films have been deposited onto PET using EH ion source by combining N doping and O ion treatment with methane as precursor gas.iv AKNOWLEDGEMENTS

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A Study on Metal-Doped Diamond-Like Carbon Film Synthesized by Ion Source and Sputtering Technique

Cited by 8 publications

References 7 publications

Studies of nanostructured copper/hydrogenated amorphous carbon multilayer films

Studies of nanostructured copper/hydrogenated amorphous carbon multilayer films

Synthesis and characterization of boron incorporated diamond-like carbon thin films

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

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