Electrode polarization (EP) is inevitable in high conductivity buffers at low AC frequencies due to the accumulation of free charges at the electrode/electrolyte interface. Electrode miniaturization increases EP effect on impedance measurements. In this paper, six gold planar (GP) electrodes having different diameters ( ) were used to investigate the size effect on EP with parallel plate electrode geometry. GP electrode surface was electrochemically deposited with gold nanostructures (GNs) to minimize the EP effect. Equivalent circuit model was used to attain electrode/electrolyte interfacial impedance. Constant phase element model was used to analyze the relation between the size and morphology of electrodes on EP. The surface morphology of gold nanostructured electrodes was examined using SEM, and the influence of different applied potential on the growth of GNs was elucidated with Nernst equilibrium condition. Surface roughness and wettability characteristics were examined performing surface roughness and contact angle measurements, respectively. The improvement of GNs deposited electrode performance was investigated by analytically generated Jurkat cell suspension spectra. The results show that the error in estimating the subcellular properties can be drastically reduced by using GNs deposited electrodes.