Metrology, Inspection, and Process Control for Microlithography XXIII 2009
DOI: 10.1117/12.814098
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Accurate electrical prediction of memory array through SEM-based edge-contour extraction using SPICE simulation

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“…5). 3 The numbers refer to the extract parameters, as described in Table 1. These structures were used for physical data extraction and electrical prediction.…”
Section: Methodsmentioning
confidence: 99%
“…5). 3 The numbers refer to the extract parameters, as described in Table 1. These structures were used for physical data extraction and electrical prediction.…”
Section: Methodsmentioning
confidence: 99%