“…16,17 In general, apart from pure scientific and e-beam/X-ray damage aspects, [18][19][20] electron irradiation of SAMs represents an important physical tool for the functionalization and patterning of surfaces. It was, in particular, used for creation of sophisticated mixed SAMs, 21,22 fabrication of chemical gradients, 23,24 fixation of metal films at the SAM-ambient interface, 25,26 work function tuning, 27 SAM-based lithography and related nanofabrication, 24,[28][29][30][31][32][33][34][35][36][37][38][39][40] and preparation of SAM-based carbon nanomembranes (CNMs). [41][42][43][44][45][46][47] Such nanomembranes can, in general, be prepared from aromatic SAMs by relying on electron-induced cross-linking of the molecular backbones.…”