Advanced surface micromachining process — A first step towards 3D MEMS

Claßen, Johannes; Reinmuth, Jochen; Kalberer, Arnd; Scheurle, Andreas; Günther, Sebastian; Kiesel, Stefan; Schellin, B.; Brauer, Jörg; Eicher, Laura

doi:10.1109/memsys.2017.7863404

Cited by 23 publications

(7 citation statements)

References 1 publication

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“…Compared to bulk micromachining, surface micromachining is a highly advantageous technique, as it allows for the fabrication of structures as small as 10 mm, with smaller footprints and tighter tolerance, which are easier to integrate into electronic microstructures [86]. Therefore, it is a well-established technique for the mass production of MEMS devices, such as sensors, actuators, motors, gears, grippers, and micromirror assays [84,85,100]. However, surface microstructures handling and integrating during manufacture is challenging as they are considerably vulnerable [86].…”

Section: Surface Micromachiningmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the biomedical field, especially in drug synthesis and delivery, microsurgery, microtherapy, diagnostics and prevention, artificial organs, genome synthesis and sequencing, and cell manipulation and characterization. Their tremendous potential resides in the advantages offered by their reduced size, including ease of integration, lightweight, low power consumption, high resonance frequency, the possibility of integration with electrical or electronic circuits, reduced fabrication costs due to high mass production, and high accuracy, sensitivity, and throughput. In this context, this paper aims to provide an overview of MEMS technology by describing the main materials and fabrication techniques for manufacturing purposes and their most common biomedical applications, which have evolved in the past years.

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Section: Surface Micromachiningmentioning

confidence: 99%

Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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Section: Open-loop Architecturesmentioning

confidence: 99%

“…In this way, the upper portion of the structure, which includes the entire sensor, will be subject to identical stress-induced deformations thus minimizing drifts and eliminating the design constraints discussed above. Such a type of process was disclosed in [37]. Offset measurements against package stress on a very large statistical set were then presented in [2,37], showing a reduction of the ZGO drift in temperature, across the consumer range, by a factor 4.…”

Section: Mechanical Offsetmentioning

confidence: 99%

Silicon MEMS inertial sensors evolution over a quarter century

Langfelder

Bestetti

Gadola

2021

J. Micromech. Microeng.

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Silicon-based microelectromechanical systems (MEMS) inertial sensors have become ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in several societal fields. Driven by consumer and automotive markets, companies involved in this technological development focused mostly on low cost, miniaturization and low power consumption, somewhat sacrificing measurement accuracy. In several laboratories all over the world, however, the research toward higher-performance sensors has been going on for more than two decades, with the goal of improving two key parameters for future applications: noise density and bias stability. This review article summarizes, for silicon-based MEMS accelerometers and gyroscopes, the most relevant working principles that appeared in the scientific literature. The collection of several data about the above mentioned key figures enables tracing the roadmap for further developments in the upcoming decade.

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“…Although widely used for the fabrication of various micro/nanostructures, conventional lithography and etching processes are limited to producing two-dimensional (2D) structures [ 37 ]. To produce accurate three-dimensional (3D) structures, intricate planar approaches such as bulk micromachining and surface micromachining are required [ 38 , 39 , 40 ]. For this reason, another subtractive technique, ultraprecision tuning, has been employed, in which the material is removed by keeping the cutting tool stationary and rotating the Si workpiece.…”

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

et al. 2021

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Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing micro/nanostructured glass components with intricate geometry and a high-quality optical finish. In MNPGM, the mold, which directly imprints the desired pattern on the glass substrate, is a key component. To date, a wide variety of mold inserts have been utilized in MNPGM. The aim of this article is to review the latest advances in molds for MNPGM and their fabrication methods. Surface finishing is specifically addressed because molded glass is usually intended for optical applications in which the surface roughness should be lower than the wavelength of incident light to avoid scattering loss. The use of molds for a wide range of molding temperatures is also discussed in detail. Finally, a series of tables summarizing the mold fabrication methods, mold patterns and their dimensions, anti-adhesion coatings, molding conditions, molding methods, surface roughness values, glass substrates and their glass transition temperatures, and associated applications are presented. This review is intended as a roadmap for those interested in the glass molding field.

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Advanced surface micromachining process — A first step towards 3D MEMS

Cited by 23 publications

References 1 publication

Microelectromechanical Systems (MEMS) for Biomedical Applications

Microelectromechanical Systems (MEMS) for Biomedical Applications

Silicon MEMS inertial sensors evolution over a quarter century

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

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