Anchor loss simulation in resonators

Binder, Denis; Quévy, E.; Koyama, Tomio; Govindjee, Sanjay; Demmel, James; Howe, Roger T.

doi:10.1109/memsys.2005.1453885

Cited by 35 publications

(29 citation statements)

References 10 publications

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“…Also, out-of-plane deflections could play an important role in affecting anchor losses [31]. Mechanical vibrations induced at the anchoring points cause mechanical energy to escape the system, unless some techniques that make use of quarter-wave reflectors are adopted in order to trap the energy inside the microstructure [32].…”

Section: Quality Factormentioning

confidence: 99%

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Piazza

Stephanou

Pisano

2006

J. Microelectromech. Syst.

573

307

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This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ringshaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanical systems resonators that span a frequency range from 19 to 656 MHz showing high-quality factors in air (Q max = 4300 at 229.9 MHz), low motional resistance (ranging from 50 to 700 Ω), and center frequencies that are lithographically defined. These resonators achieve the lowest value of motional resistance ever reported for contour-mode resonators and combine it with high Q factors, therefore enabling the fabrication of arrays of high-performance microresonators with different frequencies on a single chip. Uncompensated temperature coefficients of frequency of approximately 25 ppm/°C were also recorded for these resonators. Initial discussions on mass loading mechanisms induced by metal electrodes and energy loss phenomenon are provided. KeywordsAluminum nitride, contour-mode resonators, microelectromechanical systems (MEMS) resonators, piezoelectric resonators, radio-frequency (RF) MEMS This material is posted here with permission of the IEEE. Such permission of the IEEE does not in any way imply IEEE endorsement of any of the University of Pennsylvania's products or services. Internal or personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution must be obtained from the IEEE by writing to pubs-permissions@ieee.org. By choosing to view this document, you agree to all provisions of the copyright laws protecting it. Abstract-This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanical systems resonators that span a frequency range from 19 to 656 MHz showing high-quality factors in air (Q max = 4300 at 229.9 MHz), low motional resistance (ranging from 50 to 700 ), and center frequencies that are lithographically defined. These resonators achieve the lowest value of motional resistance ever reported for contour-mode resonators and combine it with high Q factors, therefore enabling the fabrication of arrays of high-performance microresonators with different frequencies on a single chip. Uncompensated temperature coefficients of frequency of approximately 25 ppm C were also recorded for these resonators. Initial discussions on mass loading mechanisms induced by metal electrodes and energy loss phenomenon are provided.[ 2006-0019]Index Terms-Aluminum nitride, contour-mode resonators, microelectromechanical systems (MEMS) resonators, piezoelectric resonators, radio-frequency (RF) MEMS.

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Section: Quality Factormentioning

confidence: 99%

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Piazza

Stephanou

Pisano

2006

J. Microelectromech. Syst.

573

307

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“…To exercise and test our proposed methods we examine in detail the response of several radial disk resonators which have been fabricated recently [7,24,25]. A schematic of these devices is shown in Figure 7.…”

Section: Study Of Disk Resonatorsmentioning

confidence: 99%

“…The disk is driven near the frequency of the first or second axisymmetric, bulk radial, in-plane mode. In Reference [7], the disk is made of polysilicon; Reference [24] describes both polysilicon and polydiamond disks; Reference [25] is concerned with poly-SiGe disks. The choice of these disk resonators allows us to idealize the systems as axisymmetric.…”

Section: Study Of Disk Resonatorsmentioning

confidence: 99%

“…Several disk resonators have already been built [7,24,25], and in the laboratory they have shown quality factors as high as 55 000 at frequencies of up to 1.14 GHz. Through numerical experiments, we explain in detail the mechanism of anchor loss in these devices; the predictions of our model are supported by recent experimental work [25], which we also partially report here.…”

Section: Introductionmentioning

confidence: 99%

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Elastic PMLs for resonator anchor loss simulation

Bindel

Govindjee

2005

Numerical Meth Engineering

151

104

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SUMMARYElectromechanical resonators and filters, such as quartz, ceramic, and surface-acoustic wave devices, are important signal-processing elements in communication systems. Over the past decade, there has been substantial progress in developing new types of miniaturized electromechanical resonators using microfabrication processes. For these micro-resonators to be viable they must have high and predictable quality factors (Q). Depending on scale and geometry, the energy losses that lower Q may come from material damping, thermoelastic damping, air damping, or radiation of elastic waves from an anchor. Of these factors, anchor losses are the least understood because such losses are due to a complex radiation phenomena in a semi-infinite elastic half-space. Here, we describe how anchor losses can be accurately computed using an absorbing boundary based on a perfectly matched layer (PML) which absorbs incoming waves over a wide frequency range for any non-zero angle of incidence. We exploit the interpretation of the PML as a complex-valued change of co-ordinates to illustrate how one can come to a simpler finite element implementation than was given in its original presentations. We also examine the convergence and accuracy of the method, and give guidelines for how to choose the parameters effectively. As an example application, we compute the anchor loss in a micro disk resonator and compare it to experimental data. Our analysis illustrates a surprising mode-mixing phenomenon which can substantially affect the quality of resonance.

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“…To understand the response, we use a reduced model with three Arnoldi vectors (two steps of Arnoldi plus a starting vector), which approximates the full model very closely near the peak ( Figure 5). Though the peak for one of the modes has negligible magnitude compared to the peak for the other mode, the interaction of the two modes strongly affects the sharpness of the dominant mode peak: for values of the disk thickness where the two modes most closely coincide, the computed Q value for the dominant-mode peak varies over five orders of magnitude [7].…”

Section: Modeling Of a Disk Resonatormentioning

confidence: 99%

Model Reduction for RF MEMS Simulation

Bindel

Bai

Demmel

2006

Applied Parallel Computing. State of the Art in Scientific Computing

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Abstract. Radio-frequency (RF) MEMS resonators, integrated into CMOS chips, are of great interest to engineers planning the next generation of communication systems. Fast simulations are necessary in order to gain insights into the behavior of these devices. In this paper, we discuss two structure-preserving model-reduction techniques and apply them to the frequency-domain analysis of two proposed MEMS resonator designs.

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Anchor loss simulation in resonators

Cited by 35 publications

References 10 publications

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators

Elastic PMLs for resonator anchor loss simulation

Model Reduction for RF MEMS Simulation

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