The effects of sintering process conditions on the size shrinkages of low-temperature co-fired ceramic (LTCC) substrate were investigated. The process variables investigated were thickness of the stacked raw tapes, lamination pressure, lamination-pressure holding time, pre-heating time, debinding time, sintering dwell time, and sintering temperature ramp. Results revealed that the size shrinkage percentage of the LTCC samples in the lateral directions was always smaller than that in the thickness direction. The lateral shrinkage deviations were less than 2.1% for all the experiments conducted in this study. Pre-heating time, lamination-pressure holding time, debinding time, sintering dwell time and sintering temperature ramp had almost no effects on the lateral size shrinkage of the LTCC samples, and the average of the lateral shrinkage values was 15.3%, with a standard deviation of 0.17%. Lamination pressure and stacked raw-tape thickness had effects on the lateral size shrinkage of the LTCC samples, and empirical equations for calculation of the size shrinkage values were obtained by curve fitting.