2015
DOI: 10.1063/1.4930873
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Band alignment of HfO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy: Effect of CHF3 treatment

Abstract: The energy band alignment between HfO2/multilayer (ML)-MoS2 was characterized using high-resolution x-ray photoelectron spectroscopy. The HfO2 was deposited using an atomic layer deposition tool, and ML-MoS2 was grown by chemical vapor deposition. A valence band offset (VBO) of 1.98 eV and a conduction band offset (CBO) of 2.72 eV were obtained for the HfO2/ML-MoS2 interface without any treatment. With CHF3 plasma treatment, a VBO and a CBO across the HfO2/ML-MoS2 interface were found to be 2.47 eV and 2.23 eV… Show more

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Cited by 24 publications
(22 citation statements)
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“…The higher Ga profile in the MoS 2 layer than β-Ga 2 O 3 substrate probably stems from the different ion yield in the different material matrix [27]. Moreover, the tail of Mo in β-Ga 2 O 3 could be ascribed to the diffusion or depth resolution problem, which is caused by primary beam bombardment [28].
Fig.
…”
Section: Resultsmentioning
confidence: 99%
“…The higher Ga profile in the MoS 2 layer than β-Ga 2 O 3 substrate probably stems from the different ion yield in the different material matrix [27]. Moreover, the tail of Mo in β-Ga 2 O 3 could be ascribed to the diffusion or depth resolution problem, which is caused by primary beam bombardment [28].
Fig.
…”
Section: Resultsmentioning
confidence: 99%
“…Recently, plasma‐assisted doping techniques have emerged as new doping techniques on TMD materials such as MoS 2 and WSe 2 for tuning novel nanoelectronics, optoelectronics, or biosensing devices with significantly enhanced functionalities. In these plasma doping techniques, the top surfaces of MoS 2 are treated with energetic plasmas generated in a reactive ion etcher (RIE) with O 2 , SF 6 , CHF 3 , CF 4 , or Ar . These reactive species in plasma can be effective dopants for 2D materials.…”
Section: Doping Strategiesmentioning
confidence: 99%
“…The plasma‐treated MoS 2 devices exhibited improved device properties due to the plasma induced doping effect on the MoS 2 surface. In addition, O 2 plasma doping enhanced and altered the properties of 1L‐MoS 2 by creating and manipulating defects on the MoS 2 surface, enhancing, or quenching PL, or tailoring the electrical properties of 1L‐MoS 2 . More details on these studies will be presented in the application section.…”
Section: Doping Strategiesmentioning
confidence: 99%
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“…Two characteristic peaks of 2 1 E g (382.28 cm −1 ) and A 1g (406.02 cm −1 ) for all samples are mainly observed, they correspond to the inplane vibration of Mo and S atoms and the outofplane vibration of S atoms, respectively. [32,33] In addition, the frequency difference (∆k) between the A 1g and 2 1 E g modes can be used to estimate the number of layers or thickness of the MoS 2 . [34][35] The difference in the Raman characteristic peaks of the MoS 2 film on the top and bottom of the PSS is not observed and the ∆k is about 23.74 cm −1 , which may be less affected by the nanocone, or the difference in thermal expan sion coefficient is reduced, [26] which indicates that the MoS 2 film on the PSS is about 4-5 layers with excellent uniformity.…”
Section: Resultsmentioning
confidence: 99%