Beam Properties of Visible Proton-Implanted Photonic Crystal VCSELs

Kasten, A.; Siriani, Dominic F.; Hibbs‐Brenner, Mary K.; Johnson, Klein; Choquette, Kent D.

doi:10.1109/jstqe.2011.2125780

Cited by 14 publications

(9 citation statements)

References 42 publications

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“…The spectral linewidth is 0.1 nm, which is near the spectrometer resolution. The Gaussian far-field profile exhibits a 10°beam divergence, consistent with past reports [18]- [20]. Comparison of the lasing emission in Fig.…”

Section: Experimental Characterizationsupporting

confidence: 89%

“…The optical loss arising from the photonic crystal surrounding such a defect cavity contributes to suppression of higher order modes [16]. The etched photonic crystal can reduce the beam divergence to less than 20°, a typical value for a similar sized oxide-confined VCSEL, but the beam divergence is sensitive to the etch depth of the photonic crystal [18]- [20].…”

mentioning

confidence: 99%

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Low Divergence Coherently Coupled Vertical Cavity Surface Emitting Laser Ring Arrays

et al. 2022

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We report the theory and experimental verification of a method to reduce beam divergence from coherently-coupled ring arrays of photonic crystal vertical cavity surface emitting lasers (VCSELs). The photonic crystal etched into the top distributed Bragg reflector defines the optically coupled array elements, each of which has independent current injection and thus independent gain. Using a 2-dimensional complex waveguide model we simulate the supermodes of a 6-element ring array of VCSELs. The influence of the photonic crystal, free carrier loss, laser gain, and carrier-induced index suppression arising from the spatially defined gain regions are included in our analysis. Our simulations show the latter enables preferred anti-guided supermodes with reduced beam divergence. Optical characterization of the spectral and beam characteristics of 6-ring photonic crystal implanted VCSEL arrays shows that when the arrays are current-tuned to quasi-single mode operation, we find the beam divergence angle approaches 2°consistent with our simulations. This method of reduced beam divergence may have advantages for high-brightness applications.

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Section: Experimental Characterizationsupporting

confidence: 89%

mentioning

confidence: 99%

Low Divergence Coherently Coupled Vertical Cavity Surface Emitting Laser Ring Arrays

et al. 2022

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“…Vertical-cavity surface-emitting laser (VCSEL) diodes, first presented in 1979 (1), emit a coherent optical beam vertically from the device top surface and offer a number of advantages compared to conventional edge-emitting lasers, including lower threshold (2), circular and low-divergence output beam (3), single longitudinal mode emission (4), longer lifetime (5), and easy production of dense twodimensional (2D) arrays (6)(7)(8)(9)(10)(11). Commercial VCSELs are fabricated on GaAs and InP substrates (12,13), which emit light mostly in the near-infrared wavelengths (14,15).…”

Section: Introductionmentioning

confidence: 99%

An electrically pumped surface-emitting semiconductor green laser

Rashid

Liu

et al. 2020

Sci. Adv.

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“…The shape and size of the relief feature is defined using conventional UV lithography techniques. It should be mentioned that the non-circular relief features are defined in the shape of an ellipse, where it is oriented along the crystal axes of [1][2][3][4][5][6][7][8][9][10] and [110]. Figure 1.b shows an SEM image from the top surface of a VCSEL, in which a shallow-etched surface relief feature with both elliptical and circular geometries is shown.…”

Section: Epitaxial Growth and Device Fabricationmentioning

confidence: 99%

“…In other words, the optical aperture is small enough (typically smaller than 4µm) only to encompass the fundamental mode, while the higher order transverse modes simply cannot be stimulated. However, the maximum achievable singlemode output power in these devices is typically limited to 5mW or even less [9]. Additionally, the process variability in manufacturing VCSELs with small aperture, where a smaller-than-target aperture size could lead to notable increase in lasing threshold current or a larger-than-target aperture size could give rise to stimulation of the higher order modes, could increase the yield loss for large-scale fabrication of these single-mode VCSELs.…”

Section: Introductionmentioning

confidence: 99%

Single-mode single-polarization multijunction VCSELs

Ghods,

Tatah,

Johnson

2024

Vertical-Cavity Surface-Emitting Lasers XXVIII

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Increasing the number of active regions is an effective approach for scaling optical output power in vertical cavity surface emitting lasers (VCSELs). However, due to a more complex cavity structure, these devices can exhibit simultaneous stimulation of multiple higher order transverse modes. This issue is further exacerbated especially in oxide confined VCSELs, in which the possible differences in length, shape, thickness, and composition of each oxide layer can give rise to stimulation of a higher order mode. Moreover, due to cylindrical symmetry of the cavity structure, in addition to complete isotropy of the semiconductor gain material, VCSELs do not exhibit a stable and dominant polarization direction throughout their operation. In this paper, we report on design, fabrication, and characterization of single-mode single-polarization 8-junction 940nm VCSELs. Single-mode operation has been achieved by using a surface relief mode filter to preferentially reduce the effective mirror reflectivity for higher order transverse modes, and consequently, increase their threshold gain. Optimizing the shape and the size of the relief feature has shown to be effective in inducing a dominant polarization direction for the VCSELs, in which a non-circular relief feature can perturbate the cylindrical symmetry of the cavity structure. The effect of elliptical relief feature on stabilizing the polarization behavior of VCSELs has been investigated. Room-temperature continuous-wave (CW) L-I-V characteristics of a 5um VCSEL with such relief feature shows a single-mode output power of ~13.5mW at ~3mA bias current (sidemode suppression ratio >30dB) and polarization extinction ratio greater than 20dB. Moreover, this VCSEL remains reliably single-mode with stable polarization characteristics at different temperatures up to 95°C.

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Beam Properties of Visible Proton-Implanted Photonic Crystal VCSELs

Cited by 14 publications

References 42 publications

Low Divergence Coherently Coupled Vertical Cavity Surface Emitting Laser Ring Arrays

Low Divergence Coherently Coupled Vertical Cavity Surface Emitting Laser Ring Arrays

An electrically pumped surface-emitting semiconductor green laser

Single-mode single-polarization multijunction VCSELs

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