we have developed ferroelectric capacitor fabrication technique and a new sensing amplifier circuit to realize lowvoltage and high-density FRAM. Improvement of IrO x top electrode near the ferroelectric interface successively lowers operation voltage. And our developed "Dual Reference Sensing Amplifier" enables to commercialize highly-reliable FRAM with memory density of 4Mb or larger.
FRAM, Feroelectric, PZT, IrO, Dual SensingI.