Block copolymer patterns and templates

Li, Mingqi; Ober, Christopher K.

doi:10.1016/s1369-7021(06)71620-0

Cited by 232 publications

(177 citation statements)

References 91 publications

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“…A variety of nanoscale templates with vertically-aligned pores have been developed, which can either be filled with an appropriate semiconductor or used as masks for patterning underlying semiconductor layers. Relevant templates include self-assembling monolayers of nanoscale materials [37,39], anodic aluminum oxide (AAO) templates [40][41][42][43], and block copolymers [44,45].…”

Section: Template-assisted Synthesismentioning

confidence: 99%

“…Block copolymers are chemically-distinct polymers covalently bonded at one end that self-assemble into wellordered structures, including arrays of cylinders. Highlyoriented, nearly defect-free arrays of nanoscopic, cylindrical domains that span film thicknesses up to several microns and have a high degree of long-range lateral order have been produced [44,45]. The cylindrical phase can then be removed, leaving a template to be filled with nanowire material [99,106,107].…”

Section: Template-assisted Synthesis Of Ultra-low-cost Photovoltaic Nmentioning

confidence: 99%

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Nanostructured Inorganic Solar Cells

Musselman¹,

Schmidt‐Mende²

2011

Green

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Abstract. Recent progress in the development of nanostructured inorganic solar cells is reviewed. Nanostructuring of inorganic solar cells offers the possibility of reducing the cost of photovoltaics by allowing smaller amounts of lowergrade photovoltaic semiconductors to be used. Various fabrication methods used to nanostructure traditional photovoltaic semiconductors are detailed and the performance of resulting devices is discussed. The synthesis of solar cells by solution-based methods using less traditional, abundant materials is identified as a promising route to widescale photovoltaic electricity generation, and nanostructured solar cell geometries are highlighted as essential in this approach. Templating and self-assembling methods used to produce appropriate low-cost nanostructures from solutions are detailed, and the performance of preliminary ultra-lowcost cells made with these structures is reviewed.Keywords. Photovoltaic, nanostructured, inorganic. PACS® (2010). 81.07.-b, 88.40.hj, 88.40.hm. Why Nanostructure? An Introduction to the TopicIt has been predicted that the world's annual energy consumption will grow from its 2009 level of around 15 terawatt-years (TWyr) to as much as 30 TWyr by 2050 [1,2]. With more than 100,000 TW of solar power striking the earth at anytime, photovoltaic technology has long been regarded as an integral part of the solution to the world's energy problems [2,3]. Yet, the high cost of traditional photovoltaic technologies has prevented them from displacing a meaningful fraction of the electricity we derive from fossil fuel sources. Fortunately, the prospects for inexpensive photovoltaic electricity generation are improving. In recent years much research has focused on reducing the price, or cost per watt, of photovoltaic cells. In particular, the emergence of fabrication and characterization techniques on the nanometer scale (nanotechnology) has enabled new strategies to harness the sun's power in a cost-effective way. In this review, the manner in which nanotechnology is being used to improve the cost-performance balance of photovoltaic cells composed of inorganic semiconductors will be discussed. The basics of solar cell operation will be briefly explained and traditional solar cells composed of expensive, highly-crystalline inorganic semiconductors will be summarized. Next, we will explain how controlling the morphology of the semiconductors on the scale of hundreds of nanometres or less can improve the collection of electricity-generating charges from the cells, reducing their stringent materials requirements and permitting cheaper fabrication. Various techniques for fabricating nanostructures of traditional photovoltaic semiconductors will be detailed and the performance of state of the art nanostructured inorganic solar cells will be reported. A discussion will follow, in which the availability of traditional photovoltaic semiconductors and the methods for producing relevant nanostructures will be evaluated in the context of whether truly inexpensive solar cells can...

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Section: Template-assisted Synthesismentioning

confidence: 99%

Section: Template-assisted Synthesis Of Ultra-low-cost Photovoltaic Nmentioning

confidence: 99%

Nanostructured Inorganic Solar Cells

Musselman¹,

Schmidt‐Mende²

2011

Green

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“…Numerous reviews exist on block copolymers ranging from their thermodynamic properties to more applied research [26][27][28][29][30][31][32][33][34][35][36]. In this section, a short introduction to A-B diblock copolymer thin film nanostructures and the mechanisms behind the formation of ordered block copolymer nanopatterns are provided.…”

Section: Block Copolymer (Bcp) Thin Filmsmentioning

confidence: 99%

“…This 'multiscale lithographic' technique relies on using a 'top-down' lithographically defined template which imposes self-alignment (registration) and improves translational order on the 'bottom-up' self assembled polymer system; subdividing the feature size (resolution enhancement technique) of the overall process (figure 9). Many reviews have been written on the graphoepitaxy of block copolymers [26][27][28][29][30][31][32][33]106], so we have focused below on the major milestones since Segalman et al [90] first demonstrated this approach as a viable method in 2001.…”

Section: Graphoepitaxymentioning

confidence: 99%

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Farrell

Petkov²,

Morris

et al. 2010

Journal of Colloid and Interface Science

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Self-assembled nanoscale porous architectures, such as mesoporous silica films (MPS), block copolymer films (BCP) and porous anodic aluminas (PAAs), are ideal hosts for templating one dimension (1 D) nano-entities for a wide range of electronic, photonic, magnetic and environmental applications. All three templates offer dimensional scalability and tunability over a wide range, with critical pore sizes for each system well below the 20 nm threshold [1][2][3]. Recently, research has progressed towards controlling the pore direction, orientation and long range order of these nanostructures through so called directed self-assembly (DSA). Significantly, the introduction of a wide range of top-down chemically and physically pre-patterning substrates has facilitated the DSA of nanostructures into functional device arrays. The following review begins with an overview of the fundamental aspects of self-assembly and ordering processes during the formation of PAAs, BCPs and MPS films. Special attention is given to the different ways of directing self-assembly, concentrating on properties such as uni-directional alignment, precision placement and registry of the self-assembled structures to hierarchal or top down architectures. Finally, to distinguish this review from other articles we focus on research where nanostructures have been utilised in part to fabricate arrays of functioning devices below the sub 50 nm threshold, by subtractive transfer and additive methods. Where possible, we attempt to compare and contrast the different templating approaches and highlight the strengths and/or limitations that will be important for their potential integration into downstream processes. ACCEPTED MANUSCRIPT 3 SECTION 1.0: SELF ASSEMBLY AND NANO-ARCHITETCURESThe diversity of self-assembled nanostructures and more importantly, their precise orientation within a thin film (fixed to a substrate) ultimately determines their function and overall application. A large population of research reports to date have focused on identifying these orientations and related periodicities, using x-ray and microscopy tools, as well the development of methods for readily manipulating nanostructures, such as pre-patterning of silicon substrates for the alignment of block copolymers (BCPs) [4] and mesoporous thin films (MTFs) [5] and altering the growth direction of porous anodic alumina (PAA) templates [6]. In this section, a brief synopsis of the mechanisms behind the self-assembly/organisation of each system and highlight nanoscale architectures (and orientations), which are important from a device perspective. Templated mesoporous thin filmsOrdered mesoporous powders were first discovered by researchers at the Mobil Petrochemical Corporation in 1992 and shortly after, sol-gel derived mesoporous silica films were fabricated [1,7].The first series of ordered mesoporous films were reported by Yang et al. in 1996 [8], prepared using initial surfactant concentrations above their critical micelle concentration (CMC). However the films prepared fil...

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“…8 There are four types of self-assembly masks: metal, nanospheres, copolymer, and deliquescent salts. Metal nanodots (Ag) 9 can easily contaminate substrates and are hard to remove, diversified inorganic (silica) 10 and organic (colloids) 11 nanospheres tend to agglomerate, copolymer micells' 12 diameter is limited, while deliquescent salt masks have the advantages of easy mask removing, high etch selectivity, high coverage, wide diameter range and compatibility. CsCl is one of such deliquescent salts and it's easy to acquire.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of silicon nanotip arrays with high aspect ratio by cesium chloride self-assembly and dry etching

et al. 2014

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Nanotip arrays with high aspect ratio, which have attracted much attention due to their potential applications, have been fabricated by many methods. Dry etching combined with self-assembly masks is widely used because of the convenience of dry etching and high throughput of self-assembly. In this paper, we report a method combining Cesium Chloride (CsCl) self-assembly with inductively coupled plasma (ICP) dry etching to fabricate silicon nanotip arrays with high aspect ratio and silicon nanotip arrays with aspect ratio 15 have been achieved after optimization of all parameters.

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Block copolymer patterns and templates

Cited by 232 publications

References 91 publications

Nanostructured Inorganic Solar Cells

Nanostructured Inorganic Solar Cells

Self-assembled templates for the generation of arrays of 1-dimensional nanostructures: From molecules to devices

Fabrication of silicon nanotip arrays with high aspect ratio by cesium chloride self-assembly and dry etching

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