2008 38th European Microwave Conference 2008
DOI: 10.1109/eumc.2008.4751602
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Broadband Dielectric Material Characterization: A Comparison of On-Wafer and Split-Cylinder Resonator Measurements

Abstract: We examine a broadband method to extract the relative permittivity and loss tangent of low-loss dielectric substrates from on-wafer scattering-parameter measurements of coplanar waveguides of differing lengths. To validate this method, we compare with measurements performed using two different splitcylinder resonators and demonstrate agreement over a broad frequency range.

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Cited by 10 publications
(5 citation statements)
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“…Recent vector network analyzers with interpolated calibration allow, during a change of frequency band, to maintain the calibration procedure during the broadband characterization thanks to several TE 01(2q +1) modes are used [4,5,6,7]. Indeed, the quality factor measurement, made in narrow frequency band for accuracy considerations, no longer requires a specific calibration for each used band.…”
Section: Experimental Dispositifmentioning
confidence: 99%
“…Recent vector network analyzers with interpolated calibration allow, during a change of frequency band, to maintain the calibration procedure during the broadband characterization thanks to several TE 01(2q +1) modes are used [4,5,6,7]. Indeed, the quality factor measurement, made in narrow frequency band for accuracy considerations, no longer requires a specific calibration for each used band.…”
Section: Experimental Dispositifmentioning
confidence: 99%
“…The trigonometric integrals ( ) are defined in the Appendix. As for Y 21 , c are the magnetic z weights and d are the magnetic φ weights of basis functions…”
Section: Parameter Y 22mentioning
confidence: 99%
“…This structure has been analyzed by many methods and techniques, some of them stand out for introducing notable improvements or innovations in the model. The most classical one is described by Janezic [3], which was improved including some higher-order modes in [20] and [21]. In [22], the resonant frequency for the measurement of dielectric constant becomes tunable because it includes the possibility of modifying the lengths of the upper or lower parts of the split cavity.…”
Section: Introductionmentioning
confidence: 99%
“…The method of [1] was verified with the aid of split-post and split-cylinder measurements [5] in [6]. In that investigation, however, only the uncertainties of the resonator-based measurement techniques were calculated.…”
Section: Introductionmentioning
confidence: 99%