“…The instrumentation includes two slope measuring long-trace profilers, the LTP-II 34 and DLTP, 35 a 6-in. aperture interferometer, a ZYGO™ GPI, 40 two interferometric microscopes, a ZYGO™ NewView-7300 41,42 and a MicroMap™-570, 43 an atomic force microscope, a Veeco™ Dimension-3100, 44 an optical microscope, a NIKON™ MM-800/L, a differential laser Doppler vibrometer, a Polytec™ OFV-5000/OFV-552 (not shown in Fig. 3), and various systems for development and characterization of new x-ray optics, optics and mechanical systems, as well as for testing and calibration of the metrology instrumentation.…”