WSi 2 /Si multilayer sectioning by reactive ion etching for multilayer Laue lens fabrication

Bouet, Nathalie; Conley, Ray; Biancarosa, J.; Divan, Ralu; Macrander, Albert T.

doi:10.1117/12.865306

SPIE Proceedings

2010

DOI: 10.1117/12.865306

|View full text |Cite

WSi 2 /Si multilayer sectioning by reactive ion etching for multilayer Laue lens fabrication

Nathalie Bouet

Ray Conley

J. Biancarosa

et al.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2012

2017

Publication Types

Select...

Article3

Relationship

Self Cite0

Independent3

Authors

Journals

Cited by 3 publications

(1 citation statement)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Films with thickness ranging from 80nm to 1µm were patterned using optical lithography and reactive ion etching in SF6 + O2 17 into both quarter wavelength co--planar wavequide (CPW) resonators and lumped element resonators. Unless otherwise noted, the results below are for CPW resonators with a center strip width of 8 μm and a gap width of 7 μm.…”

mentioning

confidence: 99%

Tungsten silicide films for microwave kinetic inductance detectors

Cecil

Miceli

Quaranta

et al. 2012

Applied Physics Letters

View full text Add to dashboard Cite

Microwave Kinetic Inductance Detectors (MKIDs) provide highly multiplexed arrays of detectors that can be configured to operate from the sub-millimeter to the X-ray regime. We have examined two tungsten silicide alloys (W5Si3 and WSi2), which are dense alloys that provide a critical temperature tunable with composition, large kinetic inductance fraction, and high normal-state resistivity. We have fabricated superconducting resonators and provide measurement data on critical temperature, surface resistance, quality factor, noise, and quasiparticles lifetime. Tungsten silicide appears to be promising for microwave kinetic inductance detectors

show abstract

mentioning

confidence: 99%

Tungsten silicide films for microwave kinetic inductance detectors

Cecil

Miceli

Quaranta

et al. 2012

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

Hard x-ray nanofocusing by multilayer Laue lenses

Yan¹,

Conley²,

Bouet³

et al. 2014

J. Phys. D: Appl. Phys.

119

View full text Add to dashboard Cite

Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses

Huang

Nazaretski

et al. 2017

Opt. Express

View full text Add to dashboard Cite

We report scanning hard x-ray imaging with a monolithic focusing optic consisting of two multilayer Laue lenses (MLLs) bonded together. With optics pre-characterization and accurate control of the bonding process, we show that a common focal plane for both MLLs can be realized at 9.317 keV. Using bonded MLLs, we obtained a scanning transmission image of a star test pattern with a resolution of 50 × 50 nm². By applying a ptychography algorithm, we obtained a probe size of 17 × 38 nm² and an object image with a resolution of 13 × 13 nm². The significant reduction in alignment complexity for bonded MLLs will greatly extend the application range in both scanning and full-field x-ray microscopies.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

WSi 2 /Si multilayer sectioning by reactive ion etching for multilayer Laue lens fabrication

Cited by 3 publications

References 14 publications

Tungsten silicide films for microwave kinetic inductance detectors

Tungsten silicide films for microwave kinetic inductance detectors

Hard x-ray nanofocusing by multilayer Laue lenses

Hard x-ray scanning imaging achieved with bonded multilayer Laue lenses

Contact Info

Product

Resources

About