Calibration of the z-axis for large-scale scanning white-light interferometers

Boedecker, Sebastian; Rembe, Christian; Schmid, H. M.; Hageney, T; Köhnlein, T

doi:10.1088/1742-6596/311/1/012027

Cited by 12 publications

(13 citation statements)

References 2 publications

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“…8. Boedecker et al [12,13] from Polytec have developed material measures with cross-sectional or crossradial multistep truncated pyramid geometries, which are aimed at calibrating wide field of view instruments up to 67 mm in the vertical range (see Fig. 9).…”

Section: Areal Materials Measuresmentioning

confidence: 99%

Calibration and verification of areal surface texture measuring instruments

Leach

Giusca

Haitjema³

et al. 2015

CIRP Annals

103

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Section: Areal Materials Measuresmentioning

confidence: 99%

Calibration and verification of areal surface texture measuring instruments

Leach

Giusca

Haitjema³

et al. 2015

CIRP Annals

103

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“…This is particularly the case if the desire is to mount the objective on a turret with other objectives of higher magnification. As a consequence, fields of view larger than 10 mm are often associated with Twyman Green [14][15][16] or other custom interferometer platforms that differ from the more flexible model of a microscope with interchangeable objectives.…”

Section: Classical Interference Objectivesmentioning

confidence: 99%

Interference microscope objectives for wide-field areal surface topography measurements

Groot

Biegen

2016

Opt. Eng

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Abstract. We propose a type of interference objective that extends the range of application for flexible microscope platforms to larger fields of view. The objective comprises a beamsplitter plate and a partially transparent reference mirror arranged coaxially with the objective lens system. The coaxial plates are slightly tilted to direct unwanted reflections outside of the imaging pupil aperture, providing high fringe contrast with spatially extended white-light illumination. Examples include a turret-mountable 1.4× magnification objective parfocal with highmagnification objectives up to 100× and a dovetail mount 0.5× objective with a 34 × 34 mm field. This design is a practical alternative to the classical Michelson and Mirau type objectives for low magnifications. © The Authors.Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…A suitable solution for this problem could be a step artefact covering a certain range of the z-travel of the machine. A step artefact has been developed by Polytec GmbH [64], and is shown in Fig. 16.…”

Section: Polytec Step Height Standardmentioning

confidence: 99%