Ag nanoparticles and multi-wall carbon nanotubes (MWNTs) were incorporated into a SnO 2 photosensitive precursor solution, and a direct-patternable film was prepared by photochemical metal-organic deposition. SnO 2 film transmittance and crystallinity were slightly reduced by light absorption of Ag nanoparticles and light scattering by MWNTs. In the case of mixed incorporation of Ag nanoparticles and MWNTs, the sheet resistance of SnO 2 hybrid films was decreased relative to incorporation of either single material. Direct-patterning of SnO 2 hybrid films was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost, and the electrical properties of SnO 2 films can be improved by incorporating Ag nanoparticles with MWNTs.