Characterisation setup of SAW devices at high temperatures and ultra high frequencies

Bardong, Jochen; Bruckner, Gudrun; Franz, Georg; Fachberger, R.; Erlacher, A.

doi:10.1109/freq.2009.5168136

Cited by 16 publications

(8 citation statements)

References 5 publications

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“…The devices were examined using a customized high temperature frequency measurement setup [3]. The bare dies were connected by Pt wire bonds to a mechanical support that was in turn connected to temperature stable cables.…”

Section: Experimental Setup and Meassurementsmentioning

confidence: 99%

Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures

Bruckner

Bardong

Fachberger

et al. 2010

2010 IEEE International Frequency Control Symposium

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Aluminum nitride (AlN) on sapphire is a promising substrate for SAW (surface acoustic wave) sensors operating at high temperatures and high frequencies. To get an experimental measure of the suitability and temperature stability of such devices, several samples of SAW delay lines were fabricated on 2" c-plane (0001) sapphire substrates with 1 µm c-plane AlN layer on top. Time-and frequency responses were recorded during annealing treatments at temperatures up to 850°C and the signals were analyzed afterwards.I.

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Section: Experimental Setup and Meassurementsmentioning

confidence: 99%

Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures

Bruckner

Bardong

Fachberger

et al. 2010

2010 IEEE International Frequency Control Symposium

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“…10), which was then mounted into a sample holder described in Bardong et al (2009) and processed under the temperature setting described in the following part of this text. The atmosphere was set to 1 hPa of nitrogen in a tube furnace.…”

Section: Methodsmentioning

confidence: 99%

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Bardong

Binder

Toskov³

et al. 2016

J. Sens. Sens. Syst.

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Abstract. Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 • C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 • C. The devices showed promising results up to 450 • C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.

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“…Step-stress-test: Eight temperature sensors were measured in wired condition in a vacuum furnace. For a detailed description of the test equipment see [15]. The measurement started at 550°C, continued at 600°C and was subsequently raised up to 700°C in steps of 20 K. The dwell time for each step was 46.5 h, resulting in a test duration of about two weeks.…”

Section: Reliability Of the Temperature Sensormentioning

confidence: 99%

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

Wall¹,

Gruenwald²,

Klein³

et al. 2015

Proceedings SENSOR 2015

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Characterisation setup of SAW devices at high temperatures and ultra high frequencies

Cited by 16 publications

References 5 publications

Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures

Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

C3.3 - A 600°C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators

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