2012
DOI: 10.7567/jjap.51.031201
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Characterization of In20Ge15Sb10Te55Phase Change Material for Phase Change Memory with Low Power Operation and Good Data Retention

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Cited by 4 publications
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“…In order to apply the Ge 2 Sb 2 Te 5 /SnSe 2 nanocomposite multilayer films to practical devices, the PCRAM cells based on [Ge 2 Sb 2 Te 5 (4 nm)/SnSe 2 (10 nm)] 6 were manufactured by CMOS technology. Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…In order to apply the Ge 2 Sb 2 Te 5 /SnSe 2 nanocomposite multilayer films to practical devices, the PCRAM cells based on [Ge 2 Sb 2 Te 5 (4 nm)/SnSe 2 (10 nm)] 6 were manufactured by CMOS technology. Fig.…”
Section: Resultsmentioning
confidence: 99%
“…2(b) shows the Kissinger plots of ln[(dT/dt)/Tc2] versus 1000/Tc for different Ge 2 Sb 2 Te 5 /SnSe 2 nanocomposite multilayer films to calculate the activation energy. It can be seen that the Ea of [Ge 2 Sb 2 Te 5 (2 nm)/ SnSe 2 (10 nm)] 8 , [Ge 2 Sb 2 Te 5 (4 nm)/SnSe 2 (10 nm)] 7 , [Ge 2 Sb 2 Te 5 (6 nm)/SnSe 2 (10 nm)] 6 , and [Ge 2 Sb 2 Te 5 (8 nm)/SnSe 2 (10 nm)] 5 films are 3.88 eV, 3.65 eV, 2.94 eV and 2.80 eV, respectively, which became smaller with decreasing of periodic number. It is due to that the interfacial atom arrangement which depended on surface reactivity is the main factor for the difference of activity energy among the films with the same constitution.…”
Section: Resultsmentioning
confidence: 99%
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“…But the relatively low crystallization temperature of GST (about 165°C) affects severely the thermal stability of amorphous state, making PCRAM not suitable for some high-temperature application. As is well known, some consumer products and automotive systems require 10-year data retention at temperatures higher than 125°C [7]. However, the PCRAM cells using GST film only have 10-year data retention at 85°C.…”
Section: Introductionmentioning
confidence: 99%