2006
DOI: 10.1109/ted.2006.870424
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Compact modeling of the effects of parasitic internal fringe capacitance on the threshold voltage of high-k gate-dielectric nanoscale SOI MOSFETs

Abstract: A compact model for the effect of parasitic internal fringe capacitance on threshold voltage in high-K gate dielectric SOI MOSFETs is developed. Our model includes the effects of the gate dielectric permittivity, spacer oxide permittivity, spacer width, gate length and width of MOS structure. A simple expression for parasitic internal fringe capacitance from the bottom edge of the gate electrode is obtained and the charges induced in the source and drain regions due to this capacitance are considered. We demon… Show more

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Cited by 41 publications
(22 citation statements)
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“…Using (13) is equivalent to make the assumption that the electric field in the oxide cross normally the oxide/channel interface (note that this assumption was also used in [9]). This is not the case at the edges of the channel, where there is a strong fringing field, especially when a thick oxide with a high-κ material is used [23]. The value of the elliptic modulus for the inner fringe capacitance k if is now discussed.…”
Section: Inner Fringe Capacitancementioning
confidence: 98%
See 1 more Smart Citation
“…Using (13) is equivalent to make the assumption that the electric field in the oxide cross normally the oxide/channel interface (note that this assumption was also used in [9]). This is not the case at the edges of the channel, where there is a strong fringing field, especially when a thick oxide with a high-κ material is used [23]. The value of the elliptic modulus for the inner fringe capacitance k if is now discussed.…”
Section: Inner Fringe Capacitancementioning
confidence: 98%
“…It should be noted that the introduction of high-κ materials with thick oxide thicknesses have induced additional parasitic capacitances, due to field lines crossing the oxide and the spacer [23], [24]. This case was not considered here.…”
Section: Inner Fringe Capacitancementioning
confidence: 99%
“…[32][33][34] At the source side, source depletion in the bulk TFET occurs due to the source-channel electric field and gate-source fringe electric field. The approximation of full depletion is adopted to solve the source depletion charge and relevant capacitance Q s;dep ¼ ÀqN s L 1 X j W g ;…”
Section: B Modeling Of Charges and Terminal Capacitancesmentioning
confidence: 99%
“…The use of high K materials [13][14] as gate oxide results in to the increase in on state current while off state current, subthreshold slope and DIBL decreases, enhancing the FinFET performance due to the fringing electric field [15]. The magnitude of the fringing electric field depends upon the dielectric constant of the medium in which it is getting leaked.…”
Section: Effect Of High K Dielectric Materials On Gaa Structurementioning
confidence: 99%