2000
DOI: 10.1002/1096-9918(200008)30:1<439::aid-sia787>3.0.co;2-k
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Condensation coefficients of noble metals on polymers: a novel method of determination by x-ray photoelectron spectroscopy

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Cited by 28 publications
(17 citation statements)
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“…The thin film formed from metallization plays a vital role in integrated devices and circuits since the deposited films must have good adhesion, low resistivity and provide good coverage. The improvement of these characteristics has stimulated intensive research by the scientific community for decades [1][2][3][4][5][6][7][8] . In the area of microelectronics, for example, especially regarding the processing of electronic components, there is a need to expose them to relatively high temperatures [1,2,5] .…”
Section: Introductionsupporting
confidence: 88%
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“…The thin film formed from metallization plays a vital role in integrated devices and circuits since the deposited films must have good adhesion, low resistivity and provide good coverage. The improvement of these characteristics has stimulated intensive research by the scientific community for decades [1][2][3][4][5][6][7][8] . In the area of microelectronics, for example, especially regarding the processing of electronic components, there is a need to expose them to relatively high temperatures [1,2,5] .…”
Section: Introductionsupporting
confidence: 88%
“…The image of a profile (Figure 3b) was traced in the topography, which shows a small variation (of the order of 1 nm) in the surface topography of the DGEBA epoxy resin. Figure 4 shows the formation of layers of three-dimensional spherical clusters, after metallization, corresponding to silver nanoparticles in the sense of their plasmonic behavior; this result is consistent with the literature for other polymers [2][3][4][5]8,13,14,23] . The images show little definition of cluster size for layers less than 5 nm, possibly due to the mobility of silver atoms on the surface of the polymer.…”
Section: Spectroscopic Analysismentioning
confidence: 99%
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“…XPS was used to determine elemental composition of alloy systems taking into account that the information depth is approximately 21 (2-3 nm) where λ is the elastic mean free path. More details about using XPS for the study of metal/polymer covering were discussed by Zaporojtchenko et al [21].…”
Section: X-ray Photoelectron Spectroscopy (Xps)mentioning
confidence: 99%