Curling probe measurement of electron density in pulse-modulated plasma

Pandey, A. K.; Sakakibara, Wataru; Matsuoka, Hiroki; Nakamura, Keiji; Sugai, Hideo

doi:10.1063/1.4862480

Cited by 24 publications

(27 citation statements)

References 18 publications

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“…Recently, the curling probe has been applied to the characterization of reactive plasmas for industrial processing [14,[19][20][21], where LP measurements were found to be difficult to use [19]. Time-resolved measurements of the electron density have been performed in a pulsed DC discharge in various gases under surface magnetic confinement [14].…”

mentioning

confidence: 99%

The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

Boni

Jarrige

Désangles

et al. 2021

Review of Scientific Instruments

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HAL is a multi-disciplinary open access archive for the deposit and dissemination of scientific research documents, whether they are published or not. The documents may come from teaching and research institutions in France or abroad, or from public or private research centers. L'archive ouverte pluridisciplinaire HAL, est destinée au dépôt et à la diffusion de documents scientifiques de niveau recherche, publiés ou non, émanant des établissements d'enseignement et de recherche français ou étrangers, des laboratoires publics ou privés.

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mentioning

confidence: 99%

The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

Boni

Jarrige

Désangles

et al. 2021

Review of Scientific Instruments

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“…These plasma images are useful in monitoring the two-dimensional (2D) uniformity of the plasma near the quartz plate. To measure the spaceand time-resolved values of electron density, a curling probe [30][31][32] of 15 mm in diameter is radially inserted at the distance ζ = 5 cm from the quartz plate surface. The curling probe enables us to accurately measure an absolute electron density from an up-shift in microwave resonance frequency of a spiral antenna using a network analyzer.…”

Section: Experimental Methodsmentioning

confidence: 99%

Generation of slowly rotating microwave plasma by amplitude-modulated resonant cavity

Hotta

Hasegawa

Nakamura

et al. 2017

Jpn. J. Appl. Phys.

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Slow rotation of microwave plasma at a rotational frequency of Ω/2π = 0.1–1000 Hz is realized to improve plasma uniformity by using a resonant cylindrical cavity and a solid-state microwave generator at a frequency of ω/2π = 2.4–2.5 GHz. The microwave at ω/2π is modulated in amplitude at Ω/2π and injected into the cavity from two orthogonal positions, exciting the TE111 mode. The cavity fields rotate either clockwise or anticlockwise at a frequency of Ω/2π when the phase differences, Δϕ at ω and ΔΦ at Ω, between the input microwaves are properly set as calculated by a theoretical analysis and finite-difference time-domain simulation. Rotating plasmas are experimentally measured in the microwave discharges of argon at 0.1–20 Torr. When the rotational frequency is low (Ω/2π < 30 Hz), a plasma rotation is visible in the optical emission image; the azimuthal rotation of a local ion density is also confirmed by a rotatable Langmuir probe array. Conversely, when Ω/2π > 1000 Hz, the electron density measurement by a curling probe reveals that the plasma rotation disappears in the downstream region. This observation is supported by a simplified analysis based on the diffusion equation, proving a characteristic distance of plasma rotation disappearance to be (Da: ambipolar diffusion coefficient).

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“…In the past decade, several planar-type APRS probes have been developed, such as the planar multipole resonance probe (pMRP) [10][11][12][13][14][15][16], curling probe [17][18][19], and flat cutoff probe [20][21][22]. These probes can be flatly embedded into the chamber wall or chuck for minimally invasive process monitoring.…”

Section: Introductionmentioning

confidence: 99%

Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure

Wang¹,

Friedrichs²,

Oberrath³

et al. 2021

Preprint

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Active plasma resonance spectroscopy (APRS) refers to a class of plasma diagnostic methods that use the ability of plasma to resonate at or near the electron plasma frequency for diagnostic purposes. The planar multipole resonance probe (pMRP) is an optimized realization of APRS.It has a non-invasive structure and allows simultaneous measurement of electron density, electron temperature, and electron-neutral collision frequency. Previous work has investigated the pMRP through the Drude model and collision-less kinetic model. The Drude model misses important kinetic effects such as collision-less kinetic damping. The collision-less kinetic model is able to capture pure kinetic effects. However, it is only applicable to the low-pressure plasma. To further study the behavior of the pMRP, we develop a collisional kinetic model in this paper, which applies to arbitrary pressure. In this model, the kinetic equation is coupled to the Poisson equation under the electrostatic approximation. The real part of the general admittance is calculated to describe the spectral response of the probe-plasma system. Both collision-less kinetic damping and collisional damping appear in the spectrum. This model provides a possibility to calculate the electron density, electron temperature, and electron-neutral collision frequency from the measurements.

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Curling probe measurement of electron density in pulse-modulated plasma

Cited by 24 publications

References 18 publications

The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

The curling probe: A numerical and experimental study. Application to the electron density measurements in an ECR plasma thruster

Generation of slowly rotating microwave plasma by amplitude-modulated resonant cavity

Kinetic investigation of the planar Multipole Resonance Probe under arbitrary pressure

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