Current State Of The Art In InSb Infrared Staring Imaging Devices

Abstract

A monolithic 128 x 128 InSb array is described for staring infrared imaging systems operating in the 3 -5pm spectral region. The array is fabricated with only 4 mask levels and has almost 5 times higher responsivity and nearly 14 times greater wafer yield as compared to a previous design. The higher responsivity has resulted in demonstration of significantly improved thermal imagery.

<title>Development of InSb staring image sensors (Invited Paper)</title>

“…Device fabrication facilities were upgraded to make bigger arrays such as 128x128 in 1983 and 256x256 later [6). These IR imagers were used airborne on F-14's and helicopters which did excellent passive and night vision performance in the Iraq Gulf War.…”