2008
DOI: 10.1007/s10836-007-5019-1
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Design Considerations for High Performance RF Cores Based on Process Variation Study

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“…Statistical uncertainty arising from sub-wavelength lithography, diffusion process, and uneven oxide thickness translate to variations in electrical parameters such as gate length, sheet resistance, threshold voltage, and gate capacitance. Non uniform deposition and diffusion of impurities translate to variations in threshold voltage [3] [4].…”
Section: Introductionmentioning
confidence: 99%
“…Statistical uncertainty arising from sub-wavelength lithography, diffusion process, and uneven oxide thickness translate to variations in electrical parameters such as gate length, sheet resistance, threshold voltage, and gate capacitance. Non uniform deposition and diffusion of impurities translate to variations in threshold voltage [3] [4].…”
Section: Introductionmentioning
confidence: 99%