Design, fabrication and characterization of miniature RF MEMS switched capacitor based phase shifter

Chakraborty, Amrita; Gupta, Bhaskar; Sarkar, B.K.

doi:10.1016/j.mejo.2014.05.009

Cited by 34 publications

(10 citation statements)

References 17 publications

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“…Where A is the contact area (120*100) µm2, ε 0 is the free space permittivity, g 0 is the initial gap when (V p = 0V), g is the gap spacing when V p is activated (0 < g < (2/3)g 0 ) and k z is the spring constant of the aluminum bridge which is is found in [20] by the equation (5). …”

Section: Simulation Of the Mechanical Characteristicsmentioning

confidence: 99%

“…The figure 5 shows the simulation result of the deflection of the bridge at pull in voltage equal to 37.4 V. In the above obtained results, we observe that the RL of the classical RF MEMS does not have almost any values under -30 dB; but for the proposed resonator has the less return loss, than -30 dB is present in the bands . Also, in terms of frequencies bands, we have a significant single usable ultrawide band [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29] for the proposed resonator in spite of two frequency bands [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27][28][29], [10][11][12][13][14][15][16][17][18]…”

Section: Simulation Of the Mechanical Characteristicsmentioning

confidence: 99%

See 1 more Smart Citation

Novel Conception of a Tunable RF MEMS Resonator

Jmai¹,

Rajhi²,

Gharsallah³

2017

ijacsa

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Section: Simulation Of the Mechanical Characteristicsmentioning

confidence: 99%

Section: Simulation Of the Mechanical Characteristicsmentioning

confidence: 99%

Novel Conception of a Tunable RF MEMS Resonator

Jmai¹,

Rajhi²,

Gharsallah³

2017

ijacsa

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“…The k z is given by Equation , where E is the Young modulus of aluminum, σ is the residual stress of the beam, and υ is the Poisson coefficient.

k_{z} = \frac{1}{2} ((), 32 italicEw {(\frac{t}{l})}^{3} + 8 σ ((), 1 - ϑ) w ((), \frac{t}{l}))

…”

Section: Determination Of Optimum Parametersmentioning

confidence: 99%

Modeling, design, and simulation of a radio frequency microelectromechanical system capacitive shunt switch

Jmai

Anacleto

Mendes

et al. 2017

Int J Numerical Modelling

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This tutorial paper presents an empirical model of a capacitive radio frequency microelectromechanical system switch in the microwave domain. The simulation results of the mechanical and electrical aspects of the proposed model were computed with Matlab. The mechanical modeling is validated by COMSOL software through the finite element method to determine the spring constant and the necessary applied voltage. The electromagnetic simulation results are validated by 3 different software: the High‐Frequency Structure Simulator based on the finite element method, the Computer Simulation Technology based on finite integration technique method, and the Advanced Design System based on the method of moments. The obtained results are performed in both down (OFF) and up (ON) states in the frequency range of 1 to 40 GHz, and the considered performance benchmarks are the insertion loss, return loss, isolation, and phase.

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“…Recently, SU-8 was used as a passivation layer to elevate a co-planar waveguide (CPW) transmission line for realising a low loss transmission line using a low resistivity silicon wafer (ρ˂100 Ω•cm) [15], [16]. Moreover, it has been reported in [3], [17] that SU-8 has been used for both lateral support for an RF MEMS switch as well as sacrificial layer. In this thesis, SU-8 is used as a base structure to elevate the proposed MEMS varactor from the silicon substrate which can reduce the parasitic and fringing field capacitance.…”

Section: Research Motivationmentioning

confidence: 99%

“…The typical operating frequency of the existing distributed MEMS transmission line (DMTL) phase shifters ranges from 8 GHz to 110 GHz [17], [53], [55], [57], [59].…”

Section: Proposed Dmtl Phase Shiftermentioning

confidence: 99%