Design of a plasma generator based on E power amplifier and impedance matching

Petreuş, Dorin; Grama, Alin; Cadar, Sergiu; Plaian, Emil; Rusu, A.

doi:10.1109/optim.2010.5510394

Cited by 15 publications

(5 citation statements)

References 13 publications

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“…Thus for k = 0 is X E = X D and C O = 0, and for k → 1 is X CO → X E , X D → ∞ and C 1 → 0, C 2 → 0. Therefore using (1), (2) and the design procedure [11] for the assumed k the desired values of capacitors C 1 , C 2 , C O can be found which are small enough to ensure that the applied capacitors are both small in size and inexpensive.…”

Section: Power Generator With a Class E Resonant Amplifiermentioning

confidence: 99%

“…In many industries h.f. power amplifiers and generators find applications in induction and dielectric heaters, plasma generators, electronic ballasts for fluorescent and HID lamps, energy harvesting circuits as well as resonant dc/dc converters [1][2][3][4][5][6][7][8][9][10]. Among possible solutions amplifiers and generators utilizing high-efficiency resonant switching Class DE and Class E amplifiers are particularly attractive.…”

Section: Introductionmentioning

confidence: 99%

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A self-oscillating h.f. power generator with a Class E resonant amplifier

Mikolajewski¹

2013

Bulletin of the Polish Academy of Sciences: Technical Sciences

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Self-oscillating h.f. power generators with a Class E amplifier are used as industrial high-efficiency h.f. power sources. In the paper a modification of the classic Class E generator by applying an additional capacitor in the matching and feedback circuit is presented. The proposed solution increases the degree of freedom in the generator design and can noticeably reduce its cost by eliminating the need for the use of high-value h.f. capacitors in the feedback loop divider. The self-oscillating Class E generator (150 W/6.78 MHz) with the proposed modification has been designed, built and its parameters were measured. Theoretical predictions were in a good agreement with experimental results. Moreover, the burst control method of the output power in the generator has also been presented.

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Section: Power Generator With a Class E Resonant Amplifiermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A self-oscillating h.f. power generator with a Class E resonant amplifier

Mikolajewski¹

2013

Bulletin of the Polish Academy of Sciences: Technical Sciences

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“…RF source modules for plasma generators have been used as a magnetron type in the sub-GHz frequency band, but recently this type of module has been developed by using a solid-state power amplifier (SSPA) in the 2.4 GHz industrial-scientific-medical (ISM) band [1][2][3][4][5][6]. To produce high-quality wafers in the semiconductor process, area coverage, uniformity and reliability during plasma generation should be considered [7,8].…”

Section: Introductionmentioning

confidence: 99%

A 2.4 GHz 20 W 8-Channel RF Source Module with Improved Channel Output Balance

et al. 2021

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This paper presents a 2.4 GHz 20 W 8-channel radio frequency (RF) source module with improved channel output balance. The proposed RF source module is composed of an RF source generation/DC control part, a power amplification part, and a power dividing part. A 2-stage power amplifier (PA) is combined with gallium nitride high-electron-mobility transistors, including a 25 W transistor and 2-way combined 120 W transistors as the drive and main PA, respectively. In addition, a structure was applied to improve the channel output balance compared to that of the previous module, and the differences of the phase and magnitude of the output power between channels are alleviated within 0.35° and 0.18 dB, respectively. A water jacket was implemented under the drive and main PAs for liquid cooling; however, unlike in the previous work, it was designed by optimizing the size of the water jacket and reducing unnecessary materials using a brazing process. The output power at each channel was 43 dBm, and the drain efficiency was more than 50% at 2.4 GHz. The total module size was 244 mm × 247.4 mm × 30 mm, and its volume was reduced by approximately 58.4% compared to that of the previous module.

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“…As a kind of switching mode amplifier, class-E power amplifier (PA) has been used on some occasions in wireless communication system, including two-way portable radios (Kang and Seo, 2016), biotelemetry (Kumar et al, 2008), plasma generation (El-Desouki et al, 2005), semiconductor processing (Petreus et al, 2010) and magnetic resonant imaging (Lee et al, 2005). Due to the advantages of compact, high-efficiency and high-frequency, class-E PA has become the new candidate for the future wireless communication applications (Leng et al, 2013;Steplewski et al, 2017).…”

Section: Introductionmentioning

confidence: 99%

Study of temperature reliability for a parallel high-efficiency class-E power amplifier

Lin

Wu²,

2017

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Purpose The purpose of this paper is to investigate the temperature reliability for a parallel high-efficiency class-E power amplifier (PA). Design/methodology/approach To explore the relationship between temperature and direct current (DC) characteristics, output power, S parameters and efficiency of the PA quantitatively, a series of reliability experiments have been designed and conducted to study the temperature reliability for this PA. Findings From the results, the prominent performance degradation even failure is found during the testing. Furthermore, the thermal shock test can cause permanent failure, which is a great threat for PA. Research limitations/implications Therefore, to ensure the good performance, the influence of temperature on PA reliability should be carefully considered during the stage of PA design. Practical implications All these can provide important guidance for the reliability design of PA. Social implications All these can give some important guidance for PA application. Originality/value In addition, PA is usually designed according to the electrical properties at the room temperature. From the results above, it can be concluded that it may be unable to satisfy the performance requirement at high temperature. In turn, if it is designed according to the electrical properties at low temperature, the transistor often works in the super-saturated state, the reliability of PA will become the new problem. Therefore, to ensure the good performance, the influence of temperature on PA reliability should be carefully considered during the design.

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Design of a plasma generator based on E power amplifier and impedance matching

Cited by 15 publications

References 13 publications

A self-oscillating h.f. power generator with a Class E resonant amplifier

A self-oscillating h.f. power generator with a Class E resonant amplifier

A 2.4 GHz 20 W 8-Channel RF Source Module with Improved Channel Output Balance

Study of temperature reliability for a parallel high-efficiency class-E power amplifier

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