This study gives a guideline on developing high bandgap, high quality hydrogenated amorphous silicon (a-Si:H) through a carefully engineered nanostructure. Single-junction a-Si:H solar cells with open-circuit voltages (Voc) above 950 mV and conversion efficiencies above 9% are realized by processing the absorber layers at high pressures of 7–10 mbar. The high Voc is a result of an increased bandgap, which is attributed to an increase in the average size of the open volume deficiencies in the absorber layer without a significant increase in the nanosized void density.