16th International Conference on VLSI Design, 2003. Proceedings.
DOI: 10.1109/icvd.2003.1183121
|View full text |Cite
|
Sign up to set email alerts
|

Detailed analysis of FIBL in MOS transistors with high-k gate dielectrics

Abstract: This paper analyzes in detail the Fringing Induced Barrier Lowering (FIBL)

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
4
0

Publication Types

Select...
5
2
1

Relationship

0
8

Authors

Journals

citations
Cited by 13 publications
(4 citation statements)
references
References 13 publications
0
4
0
Order By: Relevance
“…However, these studies have not explained the physical mechanism of the FIBL effect thoroughly. Mohaoatra et al [11] proposed an equivalent electrical distance theory to describe the FIBL effect, but the influence of the spacer on the device characteristics has not been included.…”
Section: Introductionmentioning
confidence: 99%
“…However, these studies have not explained the physical mechanism of the FIBL effect thoroughly. Mohaoatra et al [11] proposed an equivalent electrical distance theory to describe the FIBL effect, but the influence of the spacer on the device characteristics has not been included.…”
Section: Introductionmentioning
confidence: 99%
“…[5][6][7][8] Among the comprehensive studies for the high-κ=metal gate (HKMG), the lateral field penetration through the high-κ dielectric has been issued accompanying the fringing field induced barrier lowering (FIBL) effects such as degradation of threshold voltage (V th ), subthreshold swing (SS), and I off , which are quite different from the drain induced barrier lowering (DIBL) caused by the reverse bias on the channelto-drain junction. [9][10][11][12][13][14][15][16] In this work, however, we discovered that the amount of gate induced drain leakage (GIDL) suppression by a high-κ dielectric is sufficient to mitigate the FIBL effects at somehow optimal high-κ permittivity region. Since the GIDL current is proportionally dependent on the electric field intensity owing to the base on the band-to-band tunneling (BTBT) mechanism, it is possible to suppress the GIDL currents with a reduced electric field through the high-κ dielectrics.…”
Section: Introductionmentioning
confidence: 93%
“…Ref. [20] reports the characteristics of the LAC device with high-gate dielectric. It was noted that the strong coupling of source to the drain via the high-gate insulator is only slightly affected by channel engineering.…”
Section: Discussionmentioning
confidence: 99%