2013
DOI: 10.1142/s0218625x13500170
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DETERMINATION OF PHYSICAL RESPONSE IN (Mo/AlN) SAW DEVICES

Abstract: This paper describes the experimental conditions in surface acoustic wave (SAW) designed on aluminum nitride (AlN) films grown on Si3N4 substrates by using pulsed laser deposition. Moreover it was studied the dependency of optical properties with temperature of deposition. The thickness, measured by profilometry technology, was 150 nm for all films. Moreover, SAW devices with a Mo/AlN/Si3N4 configuration were fabricated employing AlN buffer and Mo Channel. The morphology and composition of the films were studi… Show more

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Cited by 10 publications
(10 citation statements)
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“…In previous works, we have shown the influence of the surface quality of the AlN nanostructures as substrates for Surface Acoustic Wave sensor (SAW) [16], its composition and surface roughness have a critical impact on the quality of the device. As the surface acoustic wave is only propagated on the surface, all the energy is concentrated almost within a wavelength from the surface to the inside.…”
Section: A Sem Analysismentioning
confidence: 99%
“…In previous works, we have shown the influence of the surface quality of the AlN nanostructures as substrates for Surface Acoustic Wave sensor (SAW) [16], its composition and surface roughness have a critical impact on the quality of the device. As the surface acoustic wave is only propagated on the surface, all the energy is concentrated almost within a wavelength from the surface to the inside.…”
Section: A Sem Analysismentioning
confidence: 99%
“…The peaks at 534.4 eV, 397.3 eV, 124.4 eV, and 73.9 eV correspond to O1s, N1s, Al2s, and Al2p binding energies, respectively. Calculation of the peak areas of deconvoluted spectrum (Figure 7) without O1s contribution gives an atomic ratio of Al:N = 0.392: 0.588, which is similar to the stoichiometry of Al 0.40 N 0.60 (Caicedo et al, 2013). The core electronic spectra carry the information about the chemical composition and bonding character of the Al-N films.…”
Section: X-ray Photoelectron Spectroscopy (Xps) Analysismentioning
confidence: 56%
“…The IR-spectra provided important information about the composition, homogeneity, crystallinity and the residual stresses present in the films. Moreover, the ellipsometry and reflectance measurements have been used to determine the refractive index in many AlN compounds, since the ellipsometry and reflectance are sensitive and non-destructive techniques used for Levinshtein et al, 2001;Morkoc, 2013;Ruterana et al, 2006 studies of optical properties and microstructures of surfaces and thin films (Caicedo, Pérez, Caicedo, & Riascos, 2013;Pérez, Riascos, Caicedo, Cabrera, & Yate, 2011a;Rosenberger, Baird, McCullen, Auner, & Shreve, 2008;Zhuang et al, 2009). Additionally, single-chip front-end RF modules incorporating Surface Acoustic Wave (SAW) filters are a matter of intense research.…”
Section: Aluminum Nitride Applications In Acoustic Wave Sensorsmentioning
confidence: 99%
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