Development of Plastic Injection Molding Using the LIGA Process

Yoshimura, Chisato; Kobayashi, Yasunori; Aoki, Hikoharu; Ueno, Hiroshi; Saito, Susumu

doi:10.1541/ieejsmas.121.266

Cited by 11 publications

(6 citation statements)

References 2 publications

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“…Fabrication procedure A rectangle grating with a high aspect ratio can be fabricated by micro-fabrication technology, most eminently the submicron LIGA process method 20) using the nano imprint method 19) and the synchrotron radiation lithography. These are the fabrication methods for the grating with a comb-type reflective plate.…”

Section: 2mentioning

confidence: 99%

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Optimal design of the grating with reflective plate of comb type for astronomical observation using RCWA

2004

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The star formation distribution and internal movement in the Galaxy is the key variable to probe into the evolution and formation process of the Galaxy. To this end, the diffraction grating is required, which can achieve high dispersion and efficiency by direct vision grating in a wide visible wavelength region. We propose a grism that fulfills consisting of two prisms and a diffraction grating with comb-like thin reflective plates arranged in parallel. A beam of light reflected by this grism on a reflective plate spreads in the diffractive distribution determined by wavelength and grating period. In the case where high order diffraction light is employed, the structure is designed such that the highest possible efficiency is given to the wavelength at the order that satisfies interference conditions in the positive direction of the reflective plate. We design and calculated by using the program based on the Rigorous Coupled Wave Analysis (RCWA) in order to obtain the optimum conditions for high efficiency of 80% in a wide wavelength region by using the grism with high-order diffraction.

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Section: 2mentioning

confidence: 99%

“…These are the fabrication methods for the grating with a comb-type reflective plate. The submicron structure of an aspect ratio 75 (depth: 15µm, width: 0.2µm) was successfully made by the submicron LIGA process method 20) . The thickness of aluminum is made isotropic and coherently 0.029µm by sputtering on the surface of this rectangle grating.…”

Section: 2mentioning

confidence: 99%

Optimal design of the grating with reflective plate of comb type for astronomical observation using RCWA

2004

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“…A mother die is manufactured using Si micromachining, glass micromachining, and the Lithographie, Galvanoformung, Abformung (LIGA) process and electroforming molds are then produced from the mother die [14,15]. Microstructures having high aspect ratios are produced using deep reactive ion etching [16] and the LIGA process.…”

Section: Introductionmentioning

confidence: 99%

Characterization of a microfluidic device fabricated using a photosensitive sheet

Ito

Kawaguchi

Miyoshi

et al. 2007

J. Micromech. Microeng.

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We investigated the characteristics of microfluidic devices fabricated using photosensitive sheets adhered to substrates. We evaluated them in regard to practical criteria, namely chemical resistance, pressure sealing, electrical resistance and elution of ions. No samples exhibited peeling after postbaking when we investigated the adhesion characteristics by dicing. The sheet swelled dramatically on exposure to an alkaline solution. The microfluidic devices consisting of photosensitive sheet sandwiched by two Pyrex substrates and a photosensitive sheet sandwiched by two PMMA substrates had a pressure sealing of 0.6 MPa, were capable of withstanding a pressure of 0.2 MPa for 1 h when ultrapure water was injected. The sheets had a high volume resistivity (9.7 × 1012 Ω cm) and a high surface resistivity (2.3 × 1011 Ω) after postbaking. Sodium ions were adsorbed onto the photosensitive sheet and then gradually desorbed. The total amount of sodium ion elution per unit area over 24 h was 8.3 × 10−9 mol mm−2 as measured by ion exchange chromatography. These results confirm that microfluidic devices fabricated using photosensitive sheets are suitable for use as disposable devices for certain applications.

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“…Injection molding and imprinting techniques are the typical fabrication methods of polymeric microfluidic devices (11)(12)(13). A mother die for these techniques is still expensive because the mother die is fabricated by using dry etching process or LIGA process (14)(15)(16). One of the solutions to prepare a low-cost mother die with high precision is using a photoresist as a master pattern and electroforming.…”

Section: Introductionmentioning

confidence: 99%

Easy Fabrication of Microfluidic Device Using Photosensitive Sheet

Ito¹,

Maruyama²,

Ohya³

et al. 2006

ECS Trans.

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We studied characteristics of a microfluidic device fabricated by using a photosensitive sheet intercalated with substrates. Chemical resistance, electrical resistance and dissolution of ions dependent on process were evaluated. Considering the results, the microfluidic device was suitable for a disposable device. For such a device, we fabricated a micro bio-reactor integrated with an electrochemical detector. As the result of measuring the concentration of glucose by using the device, analytical curve of that was linear in range from 0.1 to 10 mM.

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Development of Plastic Injection Molding Using the LIGA Process

Cited by 11 publications

References 2 publications

Optimal design of the grating with reflective plate of comb type for astronomical observation using RCWA

Optimal design of the grating with reflective plate of comb type for astronomical observation using RCWA

Characterization of a microfluidic device fabricated using a photosensitive sheet

Easy Fabrication of Microfluidic Device Using Photosensitive Sheet

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