Development of tuned refractive-index nanocomposites to fabricate nanoimprinted optical devices

Hemmati, Hafez; Magnusson, Robert

doi:10.1364/ome.8.000175

Cited by 16 publications

(13 citation statements)

References 32 publications

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“…Thus, one can improve Q , for a given resonance position, λ r , by lowering the modulation index. One could attempt to lower the modulation index by selecting two different grating materials that are closer in permittivity values or by creating nano-composites [45]. However, this introduces additional steps to the process flow and may require additional tools and testing.…”

Section: Methodsmentioning

confidence: 99%

Axially-Anisotropic Hierarchical Grating 2D Guided-Mode Resonance Strain-Sensor

Babu

Lee

2019

Sensors

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Guided-mode resonance strain sensors are planar binary gratings that have fixed resonance positions and quality factors decided by material properties and grating parameters. If one is restricted by material choices, the quality factor can only be improved by adjusting the grating parameters. We report a new method to improve quality factor by applying a slotting design rule to a grating design. We investigate this design rule by first providing a theoretical analysis on how it works and then applying it to a previously studied 2D solid-disc guided-mode resonance grating strain sensor design to create a new slotted-disc guided-mode resonance grating design. We then use finite element analysis to obtain reflection spectrum results that show the new design produces resonances with at least a 6-fold increase in quality factor over the original design and more axially-symmetric sensitivities. Lastly, we discuss the applicability of the slotting design rule to binary gratings in general as a means of improving grating performance while retaining both material and resonance position choices.

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Section: Methodsmentioning

confidence: 99%

Axially-Anisotropic Hierarchical Grating 2D Guided-Mode Resonance Strain-Sensor

Babu

Lee

2019

Sensors

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“…The optical adhesive Norland Optical Adhesive 73 (NOA73) with a refractive index of 1.56 is chosen as the material for our grating structure. NOA73 is a flexible material that exhibits low shrinkage and cures to a solid under UV light [22] , so the fabrication process is not only simplified by nanoimprint lithography, but also mass production is possible. A device with a DC structure was fabricated in this way by Hemmati et al in 2019 [21] .…”

Section: Introductionmentioning

confidence: 99%

High performance optical sensor based on double compound symmetric gratings

Shi

Liu

et al. 2022

Chin. Opt. Lett.

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A high performance optical sensor based on a double compound symmetric gratings (DCSGs) structure is designed. The reflection spectrum of the DCSG is investigated by utilizing a method that combines a theoretical model with the eigenmode information of the grating structure. The theoretical results, which are observed to agree well with those acquired by rigorous coupled-wave analysis, show that the linewidth of the reflection spectrum decreases upon the increasing distance between the grating strips. This research work will lay a foundation for studying high performance integrated optical sensors in miniature nanostructures.

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“…Other techniques such as interference lithography (IL) or extreme ultraviolet lithography (EUVL) are available for large area patterning, but at the same time require high equipment investment costs and oftentimes multiple exposure steps to obtain two-dimensional greyscale patterns [38,39]. On the other hand, nanoimprint lithography (NIL) is a low-cost process allowing for high-throughput reproduction of multiscale patterns [40][41][42][43]. However, the obtainable nanopatterns are essentially restricted to the geometrical shape and dimensions of the imprint template [44,45].…”

Section: Introductionmentioning

confidence: 99%

Two-Dimensional Nanograting Fabrication by Multistep Nanoimprint Lithography and Ion Beam Etching

et al. 2021

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The application of nanopatterned electrode materials is a promising method to improve the performance of thin-film optoelectronic devices such as organic light-emitting diodes (OLEDs) and organic photovoltaics. Light coupling to active layers is enhanced by employing nanopatterns specifically tailored to the device structure. A range of different nanopatterns is typically evaluated during the development process. Fabrication of each of these nanopatterns using electron-beam lithography is time- and cost-intensive, particularly for larger-scale devices, due to the serial nature of electron beam writing. Here, we present a method to generate nanopatterns of varying depth with different nanostructure designs from a single one-dimensional grating template structure with fixed grating depth. We employ multiple subsequent steps of UV nanoimprint lithography, curing, and ion beam etching to fabricate greyscale two-dimensional nanopatterns. In this work, we present variable greyscale nanopatterning of the widely used electrode material indium tin oxide. We demonstrate the fabrication of periodic pillar-like nanostructures with different period lengths and heights in the two grating directions. The patterned films can be used either for immediate device fabrication or pattern reproduction by conventional nanoimprint lithography. Pattern reproduction is particularly interesting for the large-scale, cost-efficient fabrication of flexible optoelectronic devices.

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Development of tuned refractive-index nanocomposites to fabricate nanoimprinted optical devices

Cited by 16 publications

References 32 publications

Axially-Anisotropic Hierarchical Grating 2D Guided-Mode Resonance Strain-Sensor

Axially-Anisotropic Hierarchical Grating 2D Guided-Mode Resonance Strain-Sensor

High performance optical sensor based on double compound symmetric gratings

Two-Dimensional Nanograting Fabrication by Multistep Nanoimprint Lithography and Ion Beam Etching

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